X-ray nanotomography in a SEM

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7804, Issue , 2010, Pages

  Pauwels, Bart ^a   Liu, Xuan ^a   Sasov, Alexander ^a  

^a SkyScan ^*  (Belgium)

Author keywords

detection efficiency; micro tomography; nano tomography; SEM; x ray

Indexed keywords

BACK-ILLUMINATED CCD; DETECTION EFFICIENCY; DIRECT PHOTONS; EXPOSURE-TIME; EXTERNAL WALLS; FULLY DEPLETED CCD; METAL TARGET; MICRO-TOMOGRAPHY; NANO-TOMOGRAPHY; SCANNING ELECTRON MICROSCOPES; SEM; WORKING PRINCIPLES; X-RAY CHARACTERISTICS; X-RAY COMPUTER TOMOGRAPHY; X-RAY IMAGE; X-RAY NANOTOMOGRAPHY;

CAMERAS; CCD CAMERAS; ELECTRON BEAMS; IMAGING SYSTEMS; SCANNING ELECTRON MICROSCOPY; X RAYS;

COMPUTERIZED TOMOGRAPHY;

EID: 78649427772     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.860201     Document Type: Conference Paper

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