High performance Zn-Sn-O thin film transistors with Cu source/drain electrode

Physica Status Solidi - Rapid Research Letters

Volumn 7, Issue 3, 2013, Pages 196-198

  Lee, Chul Kyu ^a   Park, Se Yeob ^a   Jung, Hong Yoon ^a   Lee, Chang Kyu ^a   Son, Byeong Geun ^a   Kim, Hyo Jin ^a   Lee, Young Joo ^b   Joo, Young Chang ^b   Jeong, Jae Kyeong ^a  

^a Inha University   (South Korea)

^b Seoul National University   (South Korea)

Author keywords

Copper; Diffusion barriers; Sputtering; Thin film transistors; Zinc tin oxide

Indexed keywords

CHANNEL REGION; HIGH MOBILITY; LATERAL DIFFUSION; SOURCE/DRAIN ELECTRODES; SUBTHRESHOLD; TA FILMS; THIN-FILM TRANSISTOR (TFTS); ZINC TIN OXIDE; ZN-SN-O;

COPPER; DIFFUSION BARRIERS; SPUTTERING; THIN FILMS; TIN; TIN OXIDES; ZINC;

THIN FILM TRANSISTORS;

EID: 84874788035     PISSN: 18626254     EISSN: 18626270     Source Type: Journal    
DOI: 10.1002/pssr.201206486     Document Type: Article

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