Efficient colour splitters for high-pixel-density image sensors

Nature Photonics

Volumn 7, Issue 3, 2013, Pages 240-246

  Nishiwaki, Seiji ^a   Nakamura, Tatsuya ^a   Hiramoto, Masao ^a   Fujii, Toshiya ^b   Suzuki, Masa Aki ^a  

^a PANASONIC CORPORATION   (Japan)

^b Image Sensor Business Unit   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COLOUR FILTERS; FILTERING METHOD; INTEGRATED VALUES; LOW SIGNAL LEVELS; MICRO-SCALES; PLATE-LIKE STRUCTURE; SURROUNDING MATERIALS; WAVELENGTH OF LIGHT;

IMAGE SENSORS; LIGHT; PHOTONS; PIXELS; REFRACTIVE INDEX;

COLOR;

EID: 84874651877     PISSN: 17494885     EISSN: 17494893     Source Type: Journal    
DOI: 10.1038/nphoton.2012.345     Document Type: Article

References (28)

1. Fossum, E. R. CMOS image sensors: electronic camera-on-a-chip. IEEE Trans. Electron. Dev. 44, 1689-1698 (1997).
2. Abe, H. Device technologies for high quality and smaller pixel CCD and CMOS image sensors. in Proceedings of the International Electron Devices Meeting 989-992 (IEEE, 2004).
3. Huo, Y., Fresemaier, C. C. & Catrysse, P. B. Microlens performance limits in sub-2 mm pixel CMOS image sensors. Opt. Express 18, 5861-5872 (2010).
4. Zhang, F., Zhang, J. & Yang, C. Performance simulation and architecture optimization for CMOS image sensor pixels scaling down to 1.0 mm. IEEE Trans. Electron. Dev. 57, 788-794 (2010).
5. Jin, X. et al. Measurement of high sensitivity and low crosstalk of zero-space microlens for 2.8-mm -pitch active pixel sensor. IEEE Trans. Electron. Dev. 57, 415-421 (2010).
6. Fesenmaier, C. C., Huo, Y. & Catrysse, P. B. Optical confinement methods for continued scaling of CMOS image sensor pixels. Opt. Express 16, 20457-20470 (2008).
7. Watanabe, H. et al. A 1.4 mm front-side illuminated image sensor with a novel light guiding structure consisting of stacked lightpipes. in Proceedings of the International Electron Devices Meeting 179-182 (IEEE, 2011).
8. Agranov, G. et al. Pixel continues to shrink. Pixel development for novel CMOS image sensors. International Image Sensor Workshop 69-72 (2009).
9. Pain, B. et al. A back-illuminated megapixel CMOS image sensor. Proc. 2005 IEEE Workshop on CCD and Advanced Image Sensors 35-38 (2005).
10. Pain, B. Fabrication and initial results for a back-illuminated monolithic APS in a mixed SOI/bulk CMOS technology. Proc. 2005 IEEE Workshop on CCD and Advanced Image Sensors 102-104 (2005).
11. Iwabuchi, S. et al. A back-illuminated high sensitivity small-pixel color CMOS image sensor with flexible layout of metal wiring. Tech. Dig. ISSCC 49, 302-303 (2006).
12. Lee, K. et al. SNR performance comparison of 1.4-mm pixel: FSI, light-guide, and BSI. International Image Sensor Workshop 9-11 (2011).
13. Michelot, J. et al. Back illuminated vertically pinned photodiode with in depth charge storage. International Image Sensor Workshop 24-27 (2010).
14. Rhodes, H. et al. The mass production of second generation 65 nm BSI CMOS image sensors. International Image Sensor Workshop 28-33 (2010).
15. Lee, Y. et al. A highly manufacturable backside illumination technology for CMOS image sensor. International Image Sensor Workshop 46-49 (2010).
16. Dammann, H. Color separation gratings. Appl. Opt. 17, 2273-2279 (1978).
17. Suzuki, Y. et al. Proposal of micro-trichroic structures for high-sensitivity color image sensors. Jpn J. Appl. Phys. 50, 042201 (2011).
18. Xu, T., Wu, Y., Luo, X. & Guo, L. Plasmonic nanoresonators for high-resolution colour filtering and spectral imaging. Nature Commun. 1, 59 (2010).
19. Nguyen-Hua, N., Loa, Y. & Chen, Y. Color filters featuring high transmission efficiency and broad bandwidth based on resonant waveguide-metallic grating. Opt. Commun. 284, 2473-2479 (2010).
20. Kanamori, Y., Shimono, M. & Hane, K. Fabrication of transmission color filters using silicon subwavelength gratings on quartz substrates. IEEE Photon. Technol. Lett. 18, 2126-2128 (2006).
21. Nishiwaki, S. Imaging photodetection device. US patent 176,473 (2010).
22. Nishiwaki, S., Suzuki, M., Wakabayashi, S., Yonemoto, K. & Hiramoto, M. Imaging photodetection device. US patent 192,962 (2011).
23. Longhurst, R. S. Geometrical and Physical Optics (Longmans, 1967).
24. Feit, M. D. & Freeck, J. A. Jr. Light propagation in graded-index optical fibers. Appl. Opt. 17, 3990-3998 (1978).
25. Thylen, L. The beam propagation method: an analysis of its applicability. Opt. Quantum Electron. 15, 433-439 (1983).
26. Yee, K. S. Numerical solution of initial boundary value problems involving Maxwell's equations in isotropic media. IEEE Trans. Antennas Propag. AP-14, 302-307 (1966).
27. Hiramoto, M. et al. Solid-state imaging device. US patent 188,537 (2010).
28. Bayer, B. E. Color imaging array. US patent 3,971,065 (1976).