Micro-heater filament on polyimide membrane for gas sensor applications

2012 10th IEEE International Conference on Semiconductor Electronics, ICSE 2012 - Proceedings

Volumn , Issue , 2012, Pages 360-362

  Noor, Mimiwaty Mohd ^a   Sugandi, Gandi ^a   Majlis, Burhanuddin Yeop ^a  

^a INSTITUTE OF MICROENGINEERING AND NANOELECTRONICS IMEN   (Malaysia)

Author keywords

[No Author keywords available]

Indexed keywords

BULK- MICROMACHINING; GAS-SENSORS; HEATER FILAMENTS; MEMBRANE THICKNESS; MICRO-GAS SENSORS; MICROHEATER; POLYIMIDE MEMBRANES; POTASSIUM HYDROXIDE SOLUTION;

CHEMICAL SENSORS; GAS DETECTORS; HEATING EQUIPMENT; POTASSIUM HYDROXIDE;

POLYIMIDES;

EID: 84874145722     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SMElec.2012.6417160     Document Type: Conference Paper

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