Temperature feedback control for improving the stability of a Semiconductor-Metal-Oxide (SMO) gas sensor

IEEE Sensors Journal

Volumn 6, Issue 1, 2006, Pages 139-145

  Gong, Jian Wei ^a   Chen, Quan Fang ^a,c,d,e   Lian, Ming Ren ^b,f   Liu, Nen Chin ^b,f   Daoust, Claude ^b,f  

^a UNIVERSITY OF CENTRAL FLORIDA   (United States)

^b TYCO Safety Products Sensormatic   (United States)

^c University of Central Florida   (United States)

^d Advanced Materials Processing and Analysis Center (AMPAC)   (United States)

^e MEMS Laboratory   (United States)

^f R and D Group   (United States)

Author keywords

Feedback temperature control; Microelectromechanical systems (MEMS); Semiconductor metal oxide (SMO) sensor; Sol gel

Indexed keywords

FALSE ALARM; FEEDBACK TEMPERATURE CONTROL; MICROHEATER; SEMICONDUCTOR METAL-OXIDE (SMO) SENSOR;

FEEDBACK CONTROL; MICROELECTROMECHANICAL DEVICES; MOS DEVICES; SOL-GELS; TEMPERATURE DISTRIBUTION;

CHEMICAL SENSORS;

EID: 31144431912     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2005.844353     Document Type: Article

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