Integrated microstructure with temperature control for gas sensors

Proceedings of the International Conference on Microelectronics

Volumn 2, Issue , 1997, Pages 515-518

  Cardinali, G C ^a   Dori, L ^a   Fiorini, M ^a   Maccagnani, P ^a   Liberali, V ^a  

^a CNR   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

INTEGRATED CIRCUIT MANUFACTURE; INTERFACES (MATERIALS); SEMICONDUCTING SILICON; SUBSTRATES; TEMPERATURE CONTROL;

INTEGRATED MICROSTRUCTURE; MIXED ANALOG DIGITAL ELECTRONIC INTERFACES;

CHEMICAL SENSORS;

EID: 0031363350     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)