SCOPUS 정보 검색 플랫폼

Thin Solid Films

Volumn 529, Issue , 2013, Pages 138-142

Fabrication of antireflective nanostructures for crystalline silicon solar cells by reactive ion etching

(4) Lin, Hsin Han a Chen, Wen Hua a Wang, Chi Jen a,b Hong, Franklin Chau Nan a

a NATIONAL CHENG KUNG UNIVERSITY (Taiwan)

b EFUN Technology Corporation Limited (Taiwan)

Author keywords

Antireflection; Reactive ion etching (RIE); Reflectivity

Indexed keywords

ANTI-REFLECTION; ANTIREFLECTIVE NANOSTRUCTURE; CRYSTALLINE SILICON SOLAR CELLS; GAS COMPOSITIONS; NANO SCALE; NANO-PYRAMIDS; NANOSCALE FEATURES; REACTIVE GAS; REACTIVE ION; RF PLASMA; SOLAR REFLECTIVITIES; SUBWAVELENGTH ANTIREFLECTION STRUCTURE; WAVELENGTH RANGES;

FABRICATION; NANOSTRUCTURES; POLYSILICON; REACTIVE ION ETCHING; SULFUR HEXAFLUORIDE;

REFLECTION;

EID: 84873734657 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2012.09.047 Document Type: Conference Paper

Times cited : (8)

References (20)

1
- 36849027567
- L. Tsakalakos, J. Balch, J. Fronheiser, B.A. Korevaar, O. Sulima, and J. Rand Appl. Phys. Lett. 91 2007 233117
- (2007) Appl. Phys. Lett. , vol.91 , pp. 233117
- Tsakalakos, L.¹ Balch, J.² Fronheiser, J.³ Korevaar, B.A.⁴ Sulima, O.⁵ Rand, J.⁶

2
- 77249164255
- M.D. Kelzenberg, S.W. Boettcher, J.A. Petykiewicz, D.B. Turner- Evans, M.C. Putnam, E.L. Warren, J.M. Spurgeon, R.M. Briggs, N.S. Lewis, and H.A. Atwater Nat. Mater. 9 2010 239
- (2010) Nat. Mater. , vol.9 , pp. 239
- Kelzenberg, M.D.¹ Boettcher, S.W.² Petykiewicz, J.A.³ Turner- Evans, D.B.⁴ Putnam, M.C.⁵ Warren, E.L.⁶ Spurgeon, J.M.⁷ Briggs, R.M.⁸ Lewis, N.S.⁹ Atwater, H.A.¹⁰

3
- 77949437431
- E. Garnett, and P. Yang Nano Lett. 10 2010 1082
- (2010) Nano Lett. , vol.10 , pp. 1082
- Garnett, E.¹ Yang, P.²

4
- 61749103132
- J. Zhu, Z. Yu, G.F. Burkhard, C. Hsu, S.T. Connor, Y. Xu, Q. Wang, M. McGehee, S. Fan, and Y. Cui Nano Lett. 9 2009 279
- (2009) Nano Lett. , vol.9 , pp. 279
- Zhu, J.¹ Yu, Z.² Burkhard, G.F.³ Hsu, C.⁴ Connor, S.T.⁵ Xu, Y.⁶ Wang, Q.⁷ McGehee, M.⁸ Fan, S.⁹ Cui, Y.¹⁰

5
- 75149187832
- K.C. Sahoo, M. Lin, E. Chang, T.B. Tinh, Y. Li, and J. Huang Jpn. J. Appl. Phys. 48 2009 126508
- (2009) Jpn. J. Appl. Phys. , vol.48 , pp. 126508
- Sahoo, K.C.¹ Lin, M.² Chang, E.³ Tinh, T.B.⁴ Li, Y.⁵ Huang, J.⁶

6
- 77953318040
- J. Zhu, C. Hsu, Z. Yu, S. Fan, and Y. Cui Nano Lett. 10 2010 1979
- (2010) Nano Lett. , vol.10 , pp. 1979
- Zhu, J.¹ Hsu, C.² Yu, Z.³ Fan, S.⁴ Cui, Y.⁵

7
- 69249213906
- Z. Fan, H. Razavi, J. Do, A. Moriwaki, O. Ergen, Y. Chueh, P.W. Leu, J.C. Ho, T. Takahashi, L.A. Reichertz, S. Neale, K. Yu, M. Wu, J.W. Ager, and A. Javey Nat. Mater. 8 2009 648
- (2009) Nat. Mater. , vol.8 , pp. 648
- Fan, Z.¹ Razavi, H.² Do, J.³ Moriwaki, A.⁴ Ergen, O.⁵ Chueh, Y.⁶ Leu, P.W.⁷ Ho, J.C.⁸ Takahashi, T.⁹ Reichertz, L.A.¹⁰ Neale, S.¹¹ Yu, K.¹² Wu, M.¹³ Ager, J.W.¹⁴ Javey, A.¹⁵

8
- 34248332216
- J.Q. Xi, H. Luo, J.K. Kim, and E.F. Schubert Nat. Photonics 1 2007 176
- (2007) Nat. Photonics , vol.1 , pp. 176
- Xi, J.Q.¹ Luo, H.² Kim, J.K.³ Schubert, E.F.⁴

9
- 33744946033
- S. Chattopadhyay, L.C. Chen, and K.H. Chen Solid State Mater. Sci. 31 2006 15
- (2006) Solid State Mater. Sci. , vol.31 , pp. 15
- Chattopadhyay, S.¹ Chen, L.C.² Chen, K.H.³

10
- 79956038834
- C.C. Striemer, and P.M. Fauchet Appl. Phys. Lett. 81 2002 2980
- (2002) Appl. Phys. Lett. , vol.81 , pp. 2980
- Striemer, C.C.¹ Fauchet, P.M.²

11
- 0000645317
- Y. Kanamori, M. Sasaki, and K. Hane Opt. Lett. 24 1999 1422
- (1999) Opt. Lett. , vol.24 , pp. 1422
- Kanamori, Y.¹ Sasaki, M.² Hane, K.³

12
- 0000370938
- Y. Kanamori, K. Hane, H. Sai, and H. Yuqami Appl. Phys. Lett. 78 2001 142
- (2001) Appl. Phys. Lett. , vol.78 , pp. 142
- Kanamori, Y.¹ Hane, K.² Sai, H.³ Yuqami, H.⁴

13
- 0942300038
- Z. Yu, H. Gao, W. Wu, H. Ge, and S.Y. Chou J. Vac. Sci. Technol. B. 21 2003 2874
- (2003) J. Vac. Sci. Technol. B. , vol.21 , pp. 2874
- Yu, Z.¹ Gao, H.² Wu, W.³ Ge, H.⁴ Chou, S.Y.⁵

14
- 19744382779
- Y.F. Mei, Z.M. Li, R.M. Chu, Z.K. Tang, G.G. Siu, R.K.Y. Fu, P.K. Chu, W.W. Wu, and K.W. Cheah Appl. Phys. Lett. 86 2005 21111
- (2005) Appl. Phys. Lett. , vol.86 , pp. 21111
- Mei, Y.F.¹ Li, Z.M.² Chu, R.M.³ Tang, Z.K.⁴ Siu, G.G.⁵ Fu, R.K.Y.⁶ Chu, P.K.⁷ Wu, W.W.⁸ Cheah, K.W.⁹

15
- 11744322745
- P.A. Lewis, H. Ahmed, and T. Sato J. Vac. Sci. Technol. B. 16 1998 2938
- (1998) J. Vac. Sci. Technol. B. , vol.16 , pp. 2938
- Lewis, P.A.¹ Ahmed, H.² Sato, T.³

16
- 3042733427
- D.G. Choi, H.K. Yu, S.G. Jang, and S.M. Yang J. Am. Chem. Soc. 126 2004 7019
- (2004) J. Am. Chem. Soc. , vol.126 , pp. 7019
- Choi, D.G.¹ Yu, H.K.² Jang, S.G.³ Yang, S.M.⁴

17
- 55849116346
- H. Xu, N. Lu, D. Qi, J. Hao, L. Gao, B. Zhang, and L. Chi Small 11 2008 1972
- (2008) Small , vol.11 , pp. 1972
- Xu, H.¹ Lu, N.² Qi, D.³ Hao, J.⁴ Gao, L.⁵ Zhang, B.⁶ Chi, L.⁷

18
- 80053495109
- Y. Li, J. Zhang, L. Fang, T. Wang, S. Zhu, Y. Li, Z. Wang, L. Zhang, L. Cui, and B. Yang Small 19 2011 2769
- (2011) Small , vol.19 , pp. 2769
- Li, Y.¹ Zhang, J.² Fang, L.³ Wang, T.⁴ Zhu, S.⁵ Li, Y.⁶ Wang, Z.⁷ Zhang, L.⁸ Cui, L.⁹ Yang, B.¹⁰

19
- 66149090005
- J. Hao, N. Lu, H. Xu, W. Wang, L. Gao, and L. Chi Chem. Mater. 21 2009 1802
- (2009) Chem. Mater. , vol.21 , pp. 1802
- Hao, J.¹ Lu, N.² Xu, H.³ Wang, W.⁴ Gao, L.⁵ Chi, L.⁶

20
- 67651124701
- D. Qi, N. Lu, H. Xu, B. Yang, C. Huang, M. Xu, L. Gao, Z. Wang, and L. Chi Langmuir Lett. 25 2009 7769
- (2009) Langmuir Lett. , vol.25 , pp. 7769
- Qi, D.¹ Lu, N.² Xu, H.³ Yang, B.⁴ Huang, C.⁵ Xu, M.⁶ Gao, L.⁷ Wang, Z.⁸ Chi, L.⁹

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