Direct deposition of semitransparent conducting pyrolytic carbon films

Journal of Nanophotonics

Volumn 6, Issue 1, 2012, Pages

  Kaplas, Tommi ^a   Svirko, Yuri ^a  

^a UNIVERSITY OF EASTERN FINLAND   (Finland)

Author keywords

chemical vapor deposition; pyrolytic carbon; transparent electrodes

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CONDUCTIVE FILMS; TRANSPARENT ELECTRODES; ULTRATHIN FILMS;

CHEMICAL VAPOR; DIELECTRIC SUBSTRATES; DIRECT DEPOSITION; PYROLYTIC CARBON; SINGLE-STEP; TRANSPARENT CONDUCTIVE FILMS; ULTRA-THIN; WAFER SCALE;

CARBON FILMS;

EID: 84873416049     PISSN: None     EISSN: 19342608     Source Type: Journal    
DOI: 10.1117/1.JNP.6.061703     Document Type: Conference Paper

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