Chemistry and kinetics of chemical vapor deposition of pyrocarbon - II pyrocarbon deposition from ethylene, acetylene and 1,3-butadiene in the low temperature regime

Carbon

Volumn 36, Issue 3, 1998, Pages 177-199

  Becker, A ^a   Huttinger K J ^a  

^a UNIVERSITY OF KARLSRUHE   (Germany)

Author keywords

A. Pyrolytic carbon; B. chemical vapor deposition

Indexed keywords

EID: 0000203240     PISSN: 00086223     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0008-6223(97)00175-9     Document Type: Article

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