Chemistry and kinetics of chemical vapor deposition of pyrocarbon - IV pyrocarbon deposition from methane in the low temperature regime

Carbon

Volumn 36, Issue 3, 1998, Pages 213-224

  Becker, A ^a   Huttinger K J ^a  

^a UNIVERSITY OF KARLSRUHE   (Germany)

Author keywords

A. Pyrolytic carbon; B. chemical vapor deposition

Indexed keywords

EID: 0000203239     PISSN: 00086223     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0008-6223(97)00177-2     Document Type: Article

References (65)

1. Becker, A. and Hüttinger, K. J., Carbon, 1998, 36, 177.
2. Becker, A. and Hüttinger, K. J., Carbon, 1998, 36, 201.
3. Pierson, H. O. and Lieberman, M. L., Carbon, 1975, 13, 159.
4. Price, R. J., Bokros, J. C., Koyama, K. and Chin, J., Carbon, 1966, 4, 263.
5. Bokros, J. C., Carbon, 1965, 3, 17.
6. Beatty, R. L., Caerlsen, F. A. and Cook, J. L., Nuclear Applications, 1965, 1, 560.
7. Vohler, O., Reiser, P. L. and Sperk, E., Carbon, 1968, 6, 397.
8. Granoff, B., Pierson, H. O. and Schuster, D. M., Carbon, 1973, 11, 177.
9. Rhee, B., Fitzer, E. and Fritz, W., High Temperatures-High Pressures, 1977, 9, 231.
10. Bokros, J. C., Carbon, 1965, 3, 201.
11. Bokros, J. C. and Price, R. J., Carbon, 1966, 4, 503.
12. Syskov, K. I. and Jelikhovskaya, E. I., Carbon, 1967, 5, 201.
13. Fitzer, E. and Schlesinger, H., Carbon, 1965, 3, 247.
14. Cummings, D. F. and Diefendorf, R. F., in Extended Abstracts 16th Bienn. Conf. on Carbon. San Diego, CA, 1983, p. 190.
15. Kaae, J. L., Carbon, 1975, 13, 55.
16. Palmer, H. B. and Hirt, T. J., J. Phys. Chem., 1963, 67, 709.
17. Tesner, P. A., in Chemistry and Physics of Carbon, Vol. 19, ed. P. A. Thrower. Marcel Dekker, New York, 1984, p. 65.
18. Oro, J. and Han, J., Science, 1966, 153, 1393.
19. Vaidyaraman, S., Lackey, W. J., Agrawal, P. K. and Freeman, G. B., Carbon, 1995, 33, 1211.
20. Blekkan, E. A., Myrstad, R., Olsvik, O. and Rokstad, O. A., Carbon, 1992, 30, 665.
21. Palmer, H. and Cullis, C. F., in Chemistry and Physics of Carbon, Vol. 2, ed. P. L. Walker, Jr. Marcel Dekker, New York, 1966, p. 265.
22. Hirt, T. J. and Palmer, H. B., Carbon, 1963, 1, 65.
23. Dugwell, R. and Forster, P. J., Carbon, 1973, 11, 455.
24. Grisdale, R. O., Pfister, A. C. and v.Roosbroeck, W., The Bell System Technical Journal, 1951, 271.
25. Granoff, B., Carbon, 1974, 12, 681.
26. Kotlensky, W. V., in Chemistry and Physics of Carbon, Vol. 9, ed. P. L. Walker, Jr and P. A. Thrower. Marcel Dekker, New York, 1973, p. 9.
27. Ismail, I. M. K., Rose, M. M. and Hahowald, M. A., Carbon, 1991, 29, 575.
28. Chen, C. J. and Back, M. H., Carbon, 1979, 17, 175.
29. Berezina, Z. N. and Magaril, R. Z., Khim. Tverd. Topl., 1977, 11, 156.
30. Aref'eva, E. F., Rafal'kes, I. S. and Tesner, P. A., Khim. Tverd. Topl., 1977, 11, 113.
31. Tesner, P. A., Khim. Tverd. Topl., 1983, 17, 111.
32. Tesner, P. A., Tekunova, T. V. and Snegireva, T. D., Khim. Tverd. Topl., 1980, 14, 114.
33. Tekunova, T. V. and Tesner, P. A., Khim. Tverd. Topl., 1974, 8, 147.
34. Rogailin, M. I., Khim. Tverd. Topl., 1977, 11, 64.
35. Lucas, P., Theery, S. and Marchand, A., Extended Abstracts 18th Bienn. Conf. on Carbon, Vol. 1. Worcester, MA, 1987, p. 307.
36. Makarow, K. I. and Pechik, V. K., Extended Abstracts 10th Bienn. Conf. on Carbon. Bethlehem, PA, 1971, p. 21.
37. Gebhardt, J. J., Extended Abstracts 10th Bienn. Conf. on Carbon. Bethlehem, PA, 1971, p. 53.
38. Makarov, K. I. and Pechik, V. K., Carbon, 1969, 7, 279.
39. Eisenberg, B. and Bliss, H., Chem. Eng. Prog. Sym. Ser., 1967, 63, 3.
40. Venkateswaran, R. and Back, M. H., Carbon, 1994, 32, 911.
41. Makarov, K. I. and Pechik, V. K., Carbon, 1974, 12, 391.
42. Back, M. H., Venkateswaran, R. and Scacchi, G., Proc. of 21th Bienn. Conf. on Carbon, Vol. 1. Buffalo, 1993, p. 537f.
43. Benzinger, W., Becker, A. and Hüttinger, K. J., Carbon, 1996, 34, 957.
44. Brötz, W., Grundriß der Chemischen Reaktionstechnik. Verlag Chemie GmbH, Weinheim/Bergstraße, 1958.
45. Schmid, R. and Sapunov, V. N., Non-Formal Kinetics. Verlag Chemie, Weinheim, Deerfiled Beach, Florida, Basel, 1982.
46. Back, M. H. and Back, R. A., Pyrolysis: Theory and Industrial Practice, ed. L. F. Albright, B. L. Crynes and W. H. Corcoran. Academic Press, New York, 1983.
47. Roscoe, J. M. and Thompson, M. J., Int. J. Chem. Kin., 1985, 17, 967.
48. Palmer, H. B., Lahaye, J. and Hou, H. C., J. Phys. Chem., 1968, 72, 348.
49. Holmen, A., Rokstad, O. A. and Solbakken, A., Ind. Eng. Chem. Proc. Des. Dev., 1976, 15, 439.
50. Hidaka, Y., Nakamura, T., Tanaka, H., Inami, K. and Kawano, H., Int. J. Chem. Kin., 1989, 22, 701.
51. Lieberman, M. L. and Noles, G. T., Carbon, 1974, 12, 689.
52. Chen, C. J., Back, M. H. and Back, R. A., ACS Symp. Ser., 1976, 32, 1.
53. Davidson, D. F., Hanson, R. K. and Bowman, C. T., Int. J. Chem. Kin., 1995, 27, 305.
54. Kevorkian, V., Heat, C. E. and Boudart, M., J. Phys. Chem., 1960, 64, 964.
55. Skinner, G. B. and Ruehrwein, R. A., J. Phys. Chem., 1959, 63, 1736.
56. Kozlov, G. J. and Knorre, V. G., Combust. Flame, 1962, 6, 253.
57. Roth, P. and Just, T., Ber. Bunsenges. Phys. Chem., 1975, 79, 682.
58. Tabayashi, K. and Bauer, S. H., Combust. Flame, 1979, 34, 63.
59. Dagaut, P., Boettner, J. C. and Cathonnet, M., Int. J. Chem. Kin., 1990, 22, 641.
60. Miller, J. A. and Melius, C. F., Combust. Flame, 1992, 91, 21.
61. Gräber, W. D., Ph.D. thesis, University of Karlsruhe, Germany, 1982.
62. Becker, A. and Hüttinger, K. J., Carbon, 1998, 36, 225.
63. Rokstad, O. A., Olsvik, O., Jensen, B. and Holmen, A., Novel Production Methods for Ethylene, Light Hydrocarbons and Aromatics, ed. L. F. Albright. Marcel Dekker, New York, 1992, p. 259.
64. Benzinger, W., Ph.D. thesis, University of Karlsruhe, Germany, in preparation.
65. Baerns, M., Hofmann, H. and Renken, A., Chemische Reaktionstechnik. Georg Thieme Verlag, Stuttgart, New York, 1987.