Comparison of MEMS PZT cantilevers based on d31 and d 33 modes for vibration energy harvesting

Journal of Microelectromechanical Systems

Volumn 22, Issue 1, 2013, Pages 26-33

  Kim, Seon Bae ^a   Park, Hyejin ^a   Kim, Seung Hyun ^b   Wikle, H Clyde ^a   Park, Jung Hyun ^c   Kim, Dong Joo ^a  

^a AUBURN UNIVERSITY   (United States)

^b Brown University   (United States)

^c ARGONNE NATIONAL LABORATORY   (United States)

Author keywords

Energy harvesting; lead zirconate titanate (PZT); piezoelectric cantilevers; piezoelectric mode; piezoelectric transducers; vibration energy harvesters

Indexed keywords

AMBIENT CONDITIONS; CANTILEVER STRUCTURES; ELECTRODE DESIGN; EQUIVALENT CIRCUIT MODEL; FINGER SPACING; INTERDIGITAL ELECTRODE; LEAD ZIRCONATE TITANATE; MATERIAL CONSTANT; MATHEMATICAL EQUATIONS; OUTPUT POWER; PIEZOELECTRIC CANTILEVERS; PIEZOELECTRIC ENERGY; PIEZOELECTRIC MODE; PZT; VIBRATION ENERGIES; VIBRATION ENERGY HARVESTING;

ELECTROMECHANICAL DEVICES; ENERGY HARVESTING; INTEGRODIFFERENTIAL EQUATIONS; MEMS; NATURAL FREQUENCIES; PIEZOELECTRIC TRANSDUCERS; PIEZOELECTRICITY; SEMICONDUCTING LEAD COMPOUNDS;

NANOCANTILEVERS;

EID: 84873287753     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2012.2213069     Document Type: Article

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