Nucleation and Growth of Platinum Films on High-k/Metal Gate Materials by Remote Plasma and Thermal ALD

Physics Procedia

Volumn 32, Issue , 2012, Pages 551-560

  Fang, Qi ^a   Hodson, Chris ^a   Xu, Cigang ^a   Gunn, Robert ^a  

^a OXFORD INSTRUMENTS PLASMA TECHNOLOGY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84873023452     PISSN: 18753884     EISSN: 18753892     Source Type: Conference Proceeding    
DOI: 10.1016/j.phpro.2012.03.600     Document Type: Conference Paper

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