Transparent Al-In-Zn-O Oxide semiconducting films with various in composition for thin-film transistor applications

Ceramics International

Volumn 39, Issue 3, 2013, Pages 2561-2566

  Bak, Jun Yong ^a   Yang, Shinhyuk ^a,b   Yoon, Sung Min ^a  

^a Kyung Hee University   (South Korea)

^b Electronics and Telecommunications Research Institute (ETRI)   (South Korea)

Author keywords

Al In Zn O; Oxide semiconductor; Thin film transistors

Indexed keywords

AL-IN-ZN-O; CO-SPUTTERING METHOD; EFFECT OF IN; NEGATIVE BIAS; NEGATIVE GATE; OXIDE SEMICONDUCTING FILMS; OXIDE SEMICONDUCTOR; SPUTTERING POWER;

INDIUM; SEMICONDUCTING ORGANIC COMPOUNDS; THIN FILM TRANSISTORS; ZINC;

ALUMINUM;

EID: 84872953863     PISSN: 02728842     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ceramint.2012.09.016     Document Type: Article

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