A novel capacitive pressure sensor and interface circuitry

Microsystem Technologies

Volumn 19, Issue 1, 2013, Pages 25-30

  He, Yongtai ^a   Liu, Jinhao ^a   Li, Lei ^a   He, Jinghong ^a  

^a CHUXIONG NORMAL UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITIVE PRESSURE SENSORS; EXTERNAL PRESSURES; INTERFACE CIRCUITRY; LINEAR MEASUREMENTS; MEASUREMENT RANGE; STRUCTURE THEORY; THEORY MODEL;

CHARGE TRANSFER; FINITE ELEMENT METHOD;

PARTIAL PRESSURE SENSORS;

EID: 84872349541     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-012-1656-0     Document Type: Article

References (8)

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