A touch mode capacitive pressure sensor with long linear range and high sensitivity

3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS

Volumn , Issue , 2008, Pages 796-800

  Lv, Haojie ^a   Guo, Qiang ^a   Hu, Guoqing ^a  

^a XIAMEN UNIVERSITY   (China)

Author keywords

DTMCPS; Finite element analysis (FEA); Touch mode capacitive pressure sensor (TMCPS)

Indexed keywords

OPTICAL DESIGN; PARTIAL PRESSURE SENSORS; PRESSURE SENSORS; PRESSURE TRANSDUCERS; SENSORS;

CAPACITIVE PRESSURE SENSORS; DTMCPS; FABRICATION PROCESSES; FINITE ELEMENT ANALYSIS (FEA); HIGH SENSITIVITIES; INTERNATIONAL CONFERENCES; LINEAR RANGE; MODELING AND ANALYSIS; MOLECULAR SYSTEMS; NORMAL STRUCTURE; TOUCH MODE; TOUCH MODE CAPACITIVE PRESSURE SENSOR (TMCPS); TOUCH-POINT;

SENSITIVITY ANALYSIS;

EID: 50249155989     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/NEMS.2008.4484445     Document Type: Conference Paper

References (11)

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