Design and simulation of sensitivity diaphragm of untouched-mode capacitive pressure sensor

Chinese Journal of Sensors and Actuators

Volumn 21, Issue 2, 2008, Pages 276-279

  Shang, Yong Hong ^a   Li, Yan Qiu ^a,b   Yu, Hong Yun ^a,c   Sun, Hong Guang ^a   Su, Bo ^a  

^a INSTITUTE OF ELECTRICAL ENGINEERING   (China)

^b BEIJING INSTITUTE OF TECHNOLOGY   (China)

^c UNIVERSITY OF CHINESE ACADEMY OF SCIENCES   (China)

Author keywords

MEMS; Sensitivity diaphragm; Untouched mode capacitive pressure sensor

Indexed keywords

EID: 43049138094     PISSN: 10041699     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (8)

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