Computerized interferometric surface measurements [Invited]

Applied Optics

Volumn 52, Issue 1, 2013, Pages 1-8

  Wyant, James C ^a  

^a UNIVERSITY OF ARIZONA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MICROSCOPES; PHASE SHIFT; SURFACE MEASUREMENT; SURFACE ROUGHNESS; VIBRATION ANALYSIS;

COMPUTER GENERATED HOLOGRAMS; DYNAMIC INTERFEROMETER; INTERFERENCE MICROSCOPES; INTERFEROMETRIC MEASUREMENT; PHASE SHIFTING INTERFEROMETRY; PRECISE MEASUREMENTS; PRECISION MEASUREMENT; SURFACE MICROSTRUCTURES;

INTERFEROMETRY;

EID: 84871949574     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.52.000001     Document Type: Conference Paper

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