Instantaneous measurement Fizeau interferometer with high spatial resolution

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 8126, Issue , 2011, Pages

  Sykora, Daniel M ^a   De Groot, Peter ^a  

^a ZYGO CORPORATION   (United States)

Author keywords

Instantaneous interferometry; Instrument transfer function; Lateral resolution; Spatial resolution

Indexed keywords

CARRIER FRINGES; COHERENT OPTICS; FIZEAU INTERFEROMETERS; FIZEAU-TYPE INTERFEROMETERS; HIGH DEMAND; HIGH SLOPES; HIGH SPATIAL RESOLUTION; HIGH-LATERAL RESOLUTION; INSTANTANEOUS MEASUREMENT; INSTRUMENT DESIGNS; LATERAL RESOLUTION; OPTICAL MANUFACTURING; PHASE STEPS; PIXEL CAMERAS; SPATIAL FREQUENCY; SPATIAL RESOLUTION; TEMPORAL PHASE; ZOOM SETTINGS;

FLEXIBLE MANUFACTURING SYSTEMS; IMAGE RESOLUTION; INSTRUMENTS; INTERFEROMETERS; INTERFEROMETRY; LASER OPTICS; PHASE SHIFT; SURFACE TESTING; TRANSFER FUNCTIONS;

INSTRUMENT TESTING;

EID: 81855228699     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.894676     Document Type: Conference Paper

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