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Volumn 7790, Issue , 2010, Pages

The spatial frequency response and resolution limitations of pixelated mask spatial carrier based phase shifting interferometry

Author keywords

Interferometry; Optical testing; Spatial carrier

Indexed keywords

CONVOLUTION ALGORITHM; FIZEAU INTERFEROMETERS; FULL NYQUIST; LIMITED RESOLUTION; LIMITING FACTORS; OPTICAL IMAGING SYSTEM; OPTIMUM PERFORMANCE; PHASE MAPS; PHASE MASKS; PHASE SHIFTING INTERFEROMETRY; PHASE STEPS; SPATIAL CARRIER; SPATIAL FREQUENCY RESPONSE; SPATIAL RESOLUTION;

EID: 78649920671     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.860751     Document Type: Conference Paper
Times cited : (21)

References (9)
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    • 33746109316 scopus 로고    scopus 로고
    • edited by W. Osten,(Springer, New York)
    • J. E. Millerd in "Fringe 2005," edited by W. Osten, (Springer, New York, 2005), pg 640.
    • (2005) Fringe 2005 , pp. 640
    • Millerd, J.E.1
  • 3
    • 33749677856 scopus 로고    scopus 로고
    • Low coherence vibration insensitive fizeau interferometer
    • B. Kimbrough, J. Millerd, J. Wyant, J. Hayes, "Low Coherence Vibration Insensitive Fizeau Interferometer," Proc. SPIE 6292, (2006).
    • (2006) Proc. SPIE , vol.6292
    • Kimbrough, B.1    Millerd, J.2    Wyant, J.3    Hayes, J.4
  • 5
    • 0021463845 scopus 로고
    • Interferometric phase measurement using spatial synchronous detection
    • Womack, K. H. "Interferometric phase measurement using spatial synchronous detection." Optical Engineering, 23(4): 391-395,1984
    • (1984) Optical Engineering , vol.23 , Issue.4 , pp. 391-395
    • Womack, K.H.1
  • 6
    • 33746173435 scopus 로고    scopus 로고
    • Pixelated mask spatial carrier phase shifting interferometry-algorithms and associated errors
    • Kimbrough, B. "Pixelated mask spatial carrier phase shifting interferometry-algorithms and associated errors." Appl. Opt. 45, 4554-4562, 2006
    • (2006) Appl. Opt. , vol.45 , pp. 4554-4562
    • Kimbrough, B.1
  • 8
    • 31844437884 scopus 로고    scopus 로고
    • Interpreting Interferometric height measurements using the instrument transfer function
    • edited by W. Osten, (Springer, New York)
    • Peter de Groot, Xavier Colonna de Lega, "Interpreting Interferometric height measurements using the instrument transfer function," in "Fringe 2005," edited by W. Osten, (Springer, New York, 2005)
    • (2005) Fringe 2005
    • De Groot, P.1    De Lega, X.C.2
  • 9
    • 0002842001 scopus 로고    scopus 로고
    • Optical resolution of phase measurements of laser Fizeau interferometers
    • E. Novak et al., "Optical resolution of phase measurements of laser Fizeau interferometers," Proc. SPIE 3134, 114-121 (1997)
    • (1997) Proc. SPIE , vol.3134 , pp. 114-121
    • Novak, E.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.