Dynamic interferometry

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5875, Issue , 2005, Pages 1-10

  Brock, Neal ^b   Hayes, John ^b   Kimbrough, Brad ^a   Millerd, James ^b   North Morris, Michael ^b   Novak, Matt ^a   Wyant, James C ^a  

^a UNIVERSITY OF ARIZONA   (United States)

^b 4D Technology   (United States)

Author keywords

Interferometry; Measurement; Metrology; Optical testing; Phase measurement

Indexed keywords

AIR TURBULENCE; DYNAMIC INTERFEROMETRY; PHASE-SHIFTING ARRAYS;

OPTICAL TESTING; PHASE MEASUREMENT; PHASE SHIFT; SENSITIVITY ANALYSIS; TURBULENCE; VIBRATIONS (MECHANICAL);

INTERFEROMETRY;

EID: 29144449834     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.621245     Document Type: Conference Paper

References (13)

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4. James C. Wyant, Optics & Photonics News, 14, 4, 36-41 (2003).
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10. M. Küchel, "Methods and apparatus for phase evaluation of pattern images used in optical measurement," U.S. Patent 5,361,312 (1994).
11. James Millerd, Neal Brock, John Hayes, Brad Kimbrough, Matt Novak, Michael North-Morris and James C. Wyant, "Modern approaches in phase measuring metrology," Proc. SPIE, 5856, (2005).
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13. Millerd, J.E., Brock, N.J., Hayes, J.B., North-Morris, M.B., Novak, M., and Wyant, J.C., "Pixelated phase-mask dynamic interferometer," Proc. SPIE, 5531, 304-314, (2004).