Frequency-multiplex Fourier-transform profilometry: A single-shot three-dimensional shape measurement of objects with large height discontinuities andyor surface isolations

Applied Optics

Volumn 36, Issue 22, 1997, Pages 5347-5354

  Takeda, Mitsuo ^a   Gu, Quan ^a   Kinoshita, Masaya ^a   Takai, Hideaki ^a,b   Takahashi, Yosuke ^a,c  

^a UNIVERSITY OF ELECTRO COMMUNICATIONS   (Japan)

^b Intl Digital Communication Inc   (Japan)

^c MITSUBISHI ELECTRIC CORPORATION   (Japan)

Author keywords

Fourier transform; Fringe analysis; Heterodyne interferometry; Optical metrology; Phase unwrapping; Profilometry

Indexed keywords

EID: 0001492036     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.36.005347     Document Type: Article

References (16)

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