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Volumn 6292, Issue , 2006, Pages

Low coherence vibration insensitive fizeau interferometer

Author keywords

[No Author keywords available]

Indexed keywords

FIZEAU INTERFEROMETER; OPTICAL AXIS; PIXELATED MASK; VIBRATION INSENSITIVITY;

EID: 33749677856     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.682956     Document Type: Conference Paper
Times cited : (90)

References (9)
  • 3
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    • Measurement of transparent plates with wavelength-tuned phase-shifting interferometry
    • June
    • P. de Groot, Measurement of Transparent Plates with Wavelength-Tuned Phase-Shifting Interferometry, Applied Optics 39 (16), 2658-2663, June 2000.
    • (2000) Applied Optics , vol.39 , Issue.16 , pp. 2658-2663
    • De Groot, P.1
  • 4
    • 0001271272 scopus 로고
    • New contra old wavefront measurement concepts for interferometric optical testing
    • R. Jozwicki, M. Kujawinska, and L. Salbut, "New contra old wavefront measurement concepts for interferometric optical testing," Optical Engineering 31, 422, (1992).
    • (1992) Optical Engineering , vol.31 , pp. 422
    • Jozwicki, R.1    Kujawinska, M.2    Salbut, L.3
  • 6
    • 33746109316 scopus 로고    scopus 로고
    • edited by W. Osten, (Springer, New York)
    • J. E. Millerd in "Fringe 2005," edited by W. Osten, (Springer, New York, 2005), pg 640.
    • (2005) Fringe 2005 , pp. 640
    • Millerd, J.E.1
  • 7
    • 84859682984 scopus 로고
    • "Interferometer for measuring optical phase difference," U. S. Patent 4,872,755
    • M. Küchel, "Interferometer for measuring optical phase difference," U. S. Patent 4,872,755 (1989).
    • (1989)
    • Küchel, M.1
  • 8
    • 0009508279 scopus 로고    scopus 로고
    • Errors caused by nearly parallel optical elements in a laser Fizeau interferometer utilizing strictly coherent imaging
    • E. Novak, C. Ai, and J. C. Wyant, "Errors caused by nearly parallel optical elements in a laser Fizeau interferometer utilizing strictly coherent imaging," Proc. SPIE 3134, 456-460 (1997).
    • (1997) Proc. SPIE , vol.3134 , pp. 456-460
    • Novak, E.1    Ai, C.2    Wyant, J.C.3
  • 9
    • 2342580231 scopus 로고    scopus 로고
    • Using software to model coherent metrology systems
    • J. Shiefman, "Using software to model coherent metrology systems," Proc. SPIE 5174, 69-82 (2003).
    • (2003) Proc. SPIE , vol.5174 , pp. 69-82
    • Shiefman, J.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.