Preparation and phase structures of Zn-Ti-O ternary compounds by atomic layer deposition

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 31, Issue 1, 2013, Pages

  Qian, Xu ^a   Gao, Mo Yun ^a   Cao, Yan Qiang ^a   Guo, Bing Lei ^a   Li, Ai Dong ^a  

^a NANJING UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ANALYTICAL TOOL; DIETHYLZINC; FILM COMPOSITION; GRAIN SIZE; GROWTH PER CYCLE; MORPHOLOGIC CHANGES; PHASE DECOMPOSITIONS; PHASE EVOLUTIONS; POST-ANNEALING TEMPERATURE; PURE ZNO; RUTILE TIO; SCANNING ELECTRON MICROSCOPY IMAGE; SI SUBSTRATES; TERNARY COMPOUNDS; TERNARY FILM; TI CONTENT; TIO; TITANIUM ISOPROPOXIDE; ZNO;

DEPOSITS; OXIDE MINERALS; PHASE STRUCTURE; SCANNING ELECTRON MICROSCOPY; TITANIUM; TITANIUM DIOXIDE; ZINC; ZINC OXIDE;

ATOMIC LAYER DEPOSITION;

EID: 84871912670     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.4769451     Document Type: Article

References (24)

1. S. M. George, Chem. Rev. 110, 111 (2010). 10.1021/cr900056b
2. P. Poodt, A. Lankhorst, F. Roozeboom, K. Spee, D. Maas, and A. Vermeer, Adv. Mater. 22, 3564 (2010). 10.1002/adma.201000766
3. D. Hausmann, J. Becker, S. L. Wang, and R. G. Gordon, Science 298, 402 (2002). 10.1126/science.1073552 (Pubitemid 35189565)
4. M. Leskelä, M. Ritala, and O. Nilsen, MRS Bull. 36, 877 (2011). 10.1557/mrs.2011.240
5. F. H. Dulin and D. E. Rase, J. Am. Ceram. Soc. 43, 125 (1960). 10.1111/j.1151-2916.1960.tb14326.x
6. O. Yamaguchi, M. Morimi, H. Kawabata, and K. Shimizu, J. Am. Ceram. Soc. 70, 97 (1987). 10.1111/j.1151-2916.1987.tb05011.x
7. H. Obayashi, Y. Sakurai, and T. Gejo, J. Solid State Chem. 17, 299 (1976). 10.1016/0022-4596(76)90135-3
8. H. T. Kim, S. Nahm, and J. D. Byun, J. Am. Ceram. Soc. 82, 3476 (1999). 10.1111/j.1151-2916.1999.tb02268.x
9. S. Ozdemir and T. Bardakci, Sep. Purif. Technol. 16, 225 (1999). 10.1016/S1383-5866(99)00013-1 (Pubitemid 30024486)
10. Y. C. Lee and W. H. Lee, Jpn. J. Appl. Phys., Part 1 44, 1838 (2005). 10.1143/JJAP.44.1838 (Pubitemid 40892575)
11. H. T. Kim, Mater. Res. Bull. 33, 975 (1998). 10.1016/S0025-5408(98)00057- 9
12. Y. S. Chang, Y. H. Chang, I. G. Chen, G. J. Chen, and Y. L. Chai, J. Cryst. Growth 243, 319 (2002). 10.1016/S0022-0248(02)01490-2 (Pubitemid 34802172)
13. E. Hosono, S. Fujihara, M. Onuki, and T. Kimura, J. Am. Ceram. Soc. 87, 1785 (2004). 10.1111/j.1551-2916.2004.01785.x
14. M. R. Mohammadi and D. J. Fray, J. Eur. Ceram. Soc. 30, 947 (2010). 10.1016/j.jeurceramsoc.2009.09.031
15. Z. X. Chen, A. Derking, W. Koot, and M. P. van Dijk, J. Catal. 161, 730 (1996). 10.1006/jcat.1996.0235 (Pubitemid 126357323)
16. J. S. Jung, Y. H. Kim, S. K. Gil, and D. H. Kang, J. Electroceram. 23, 272 (2009). 10.1007/s10832-008-9423-4
17. L. Borgese, E. Bontempi, L. E. Depero, P. Colombi, and I. Alessandri, Cryst. Eng. Comm. 13, 6621 (2011). 10.1039/c1ce05923h
18. R. L. Puureunen, J. Appl. Phys. 97, 121301 (2005). 10.1063/1.1940727 (Pubitemid 40940570)
19. P. R. Moses, L. M. Wier, J. C. Lennox, H. O. Finklea, F. R. Lenhard, and R. W. Murray, Anal. Chem. 50, 576 (1978). 10.1021/ac50026a010
20. E. C. Onyiriuka, J. Non-Cryst. Solids 163, 268 (1993). 10.1016/0022-3093(93)91304-L
21. M. Chen, X. Wang, Y. H. Yu, Z. L. Pei, X. D. Bai, C. Sun, R. F. Huang, and L. S. Wen, Appl. Surf. Sci. 158, 134 (2000). 10.1016/S0169-4332(99)00601-7
22. M. Vehkamäki, T. Hatanpää, M. Ritala, and M. Leskelä, J. Mater. Chem. 14, 3191 (2004). 10.1039/b405891g
23. H. T. Kim, Y. Kim, M. Valant, and D. Suvorov, J. Am. Ceram. Soc. 84, 1081 (2001). 10.1111/j.1151-2916.2001.tb00793.x
24. Y. C. Lee, Y. L. Huang, W. H. Lee, and F. S. Shieu, Thin Solid Films 518, 7366 (2010). 10.1016/j.tsf.2010.05.005