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Journal of Electroceramics

Volumn 23, Issue 2-4, 2009, Pages 272-276

Dielectric properties of zinc titanate thin films prepared by Rf magnetron sputtering

(4) Jung, Jin Suk a Kim, Young Ho a Gil, Sang Keun a Kang, Dong Heon a

a Suwon University (South Korea)

Author keywords

Dielectric property; RF sputtering; Thin film; XRD; Zinc titanate

Indexed keywords

ANNEALING TEMPERATURES; DETECTION LIMITS; HIGHER TEMPERATURES; MAXIMUM VALUES; RF-MAGNETRON SPUTTERING; RF-SPUTTERING; SINTERED CERAMICS; SPUTTERED FILMS; TEMPERATURE RANGE; TIO; XRD; ZINC TITANATE;

AMORPHOUS FILMS; ANNEALING; MAGNETRON SPUTTERING; MAGNETRONS; OXIDE MINERALS; PHASE TRANSITIONS; SINTERING; THIN FILM DEVICES; THIN FILMS; X RAY DIFFRACTION; ZINC;

DIELECTRIC PROPERTIES;

EID: 73449097850 PISSN: 13853449 EISSN: 15738663 Source Type: Journal
DOI: 10.1007/s10832-008-9423-4 Document Type: Article

Times cited : (13)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.