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Volumn 13, Issue 22, 2011, Pages 6621-6624
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Tailoring phase and composition at the nanoscale: Atomic layer deposition of Zn-Ti-O thin films
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Author keywords
[No Author keywords available]
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Indexed keywords
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EID: 80054990447
PISSN: None
EISSN: 14668033
Source Type: Journal
DOI: 10.1039/c1ce05923h Document Type: Article |
Times cited : (10)
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References (23)
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