Atomic layer deposition of zinc sulfide with Zn(TMHD)2

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 31, Issue 1, 2013, Pages

  Short, Andrew ^a   Jewell, Leila ^a   Doshay, Sage ^a   Church, Carena ^a   Keiber, Trevor ^a   Bridges, Frank ^a   Carter, Sue ^a   Alers, Glenn ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ENERGY DISPERSIVE X-RAY SPECTROSCOPY; EXTENDED X-RAY ABSORPTION FINE STRUCTURES; GROWTH BEHAVIOR; NANO-STRUCTURED; POROUS MATRIXS; QUANTUM DOT SOLAR CELLS; SATURATION CURVE; TEMPERATURE RANGE; ZNS FILMS;

ATOMIC FORCE MICROSCOPY; ATOMIC LAYER DEPOSITION; ENERGY DISPERSIVE SPECTROSCOPY; EXTENDED X RAY ABSORPTION FINE STRUCTURE SPECTROSCOPY; INFRARED SPECTROSCOPY; OPTICAL WAVEGUIDES; SCANNING ELECTRON MICROSCOPY; ZINC;

ZINC SULFIDE;

EID: 84871891135     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.4769862     Document Type: Article

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