Using an SU-8 photoresist structure and cytochrome c thin film sensing material for a microbolometer

Sensors (Switzerland)

Volumn 12, Issue 12, 2012, Pages 16390-16403

  Lai, Jian Lun ^a   Liao, Chien Jen ^a   Su, Guo Dung John ^a  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

Cytochrome c; Exposure dose method; Microbolometer; SU 8; Temperature coefficient of resistance (TCR)

Indexed keywords

CYTOCHROME C; EXPOSURE DOSE; MICROBOLOMETER; SU-8; TEMPERATURE COEFFICIENT OF RESISTANCE;

BOLOMETERS; PROTEINS; TEMPERATURE SENSORS; THERMAL CONDUCTIVITY; X RAY LITHOGRAPHY;

PHOTORESISTS;

CYTOCHROME C; EPOXIDE; POLYMER; SU 8 COMPOUND; SU-8 COMPOUND;

ARTICLE; CHEMISTRY; INFRARED RADIATION; SURFACE PROPERTY;

CYTOCHROMES C; EPOXY COMPOUNDS; INFRARED RAYS; POLYMERS; SURFACE PROPERTIES;

EID: 84871694623     PISSN: 14248220     EISSN: None     Source Type: Journal    
DOI: 10.3390/s121216390     Document Type: Article

References (16)

1. Muralt, P. Micromachined infrared detectors based on pyroelectric thin films. Rep. Prog. Phys. 2001, doi:10.1088/0034-4885/64/10/203.
2. Niklaus, F.; Vieider, C.; Jakobsen, H. MEMS-Based uncooled infrared bolometer arrays-a review. Proc. SPIE 2007, doi:10.1117/12.755128.
3. Graf, A.; Arndt, M.; Sauer, M.; Gerlach, G. Review of micromachined thermopiles for infrared detection. Meas. Sci. Technol. 2007, doi:10.1088/0957-0233/18/7/R01.
4. Wood, R.A. Monolithic silicon microbolometer arrays. Semicond. Semimet. 1997, 47, 43-125.
5. Lv, Y.; Hu, M.; Wu, M.; Liu, Z. Preparation of vanadium oxide thin films with high temperature coefficient of resistance by facing targets d.c. reactive sputtering and annealing process. Surf. Coat. Technol. 2007, 201, 4969-4972.
6. Heredia, A.; De la Hidalga, F.J.; Torres, A.; Jaramillo, A. Low Temperature Electrical Properties of a Boron-Doped Amorphous Silicon Bolometer. In Proceedings of 204th Meeting of the Electrochemical Society, Orlando, FL, USA, 12-16 October 2003.
7. Yavuz, O.; Aldissi, M. Biomaterial-Based infrared detection. Bioinspir. Biomim. 2008, 3, 1-10.
8. Krishna, K.D. Update: A protein microbolometer for focal plane arrays. Mater. Res. Innov. 1999, 3, 66-68.
9. xSiy:H) thermo-sensing films. Bolometers 2012, doi:10.5772/32222.
10. Oh, S.H.; Lee, K.C.; Chun, J.; Kim, M.; Lee, S.S. Micro heat flux sensor using copper electroplating in SU-8 microstructures. J. Micromech. Microeng. 2001, doi:10.1088/0960-1317/11/3/310.
11. Uma, S.; McConnell, A.D.; Asheghi, M.; Kurabayashi, K.; Goodson, K.E. Temperature-dependent thermal conductivity of undoped polycrystalline silicon layers. Int. J. Thermophys. 2001, 22, 605-616.
12. Wada, H.; Kamijoh, T. Thermal conductivity of amorphous silicon. Jpn. J. Appl. Phys. 1996, 35, L648-L650.
13. Ceyssens, F.; Puers, R. Creating multi-layered structures with freestanding parts in SU-8. J. Micromech. Microeng. 2006, doi:10.1088/0960-1317/16/6/S04.
14. Bolton, B.A.; Scherer, J.R. Raman spectra and water absorption of bovine serum albumin. J. Phys. Chem. 1989, 93, 7635-7640.
15. Tissot, J.L.; Rothan, F.; Vedel, M.; Yon, J. LETI/LIR's uncooled microbolometer development Proc. SPIE 1998, doi:10.1117/12.328060.
16. y:H microbolometers. IEEE Sens. J. 2007, 7, 1413-1419.