A combined hard x-ray photoelectron spectroscopy and electrical characterisation study of metal/SiO2/Si(100) metal-oxide- semiconductor structures

Applied Physics Letters

Volumn 101, Issue 24, 2012, Pages

  Walsh, Lee A ^a   Hughes, Greg ^a   Hurley, Paul K ^b   Lin, Jun ^b   Woicik, Joseph C ^c  

^a DUBLIN CITY UNIVERSITY   (Ireland)

^b UNIVERSITY COLLEGE CORK   (Ireland)

^c NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BANDBENDING; CAPACITANCE VOLTAGE MEASUREMENTS; ELECTRICAL CHARACTERISATION; FLAT-BAND VOLTAGE; GATE LAYERS; HARD X-RAY PHOTOELECTRON SPECTROSCOPY; METAL OXIDE SEMICONDUCTOR STRUCTURES; METAL-OXIDE; SEMICONDUCTOR STRUCTURE; SI-BASED; SILICON CORES; ZERO GATE;

DIELECTRIC DEVICES; PHOTOELECTRONS; SILICON; X RAY PHOTOELECTRON SPECTROSCOPY;

SEMICONDUCTING SILICON;

EID: 84871305900     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4770380     Document Type: Article

References (21)

1. K. Kobayashi, M. Yabashi, Y. Takata, T. Tokushima, S. Shin, K. Tamasaku, D. Miwa, T. Ishikawa, H. Nohira, T. Hattori, Y. Sugita, O. Nakatsuka, A. Sakai, and S. Zaima, Appl. Phys. Lett. 83, 1005 (2003). 10.1063/1.1595714
2. P. S. Lysaght, J. Barnett, G. I. Bersuker, J. C. Woicik, D. A. Fischer, B. Foran, H.-H. Tseng, and R. Jammy, J. Appl. Phys. 101, 024105 (2007). 10.1063/1.2422746
3. K. Kakushima, K. Okamoto, K. Tachi, J. Song, S. Sato, T. Kawanogo, K. Tsutsui, N. Sugii, P. Ahmet, T. Hattori, and H. Iwai, J. Appl. Phys. 104, 104908 (2008). 10.1063/1.3021461
4. R. Claessen, M. Sing, M. Paul, G. Berner, A. Wetscherek, A. Müller, and W. Drube, New J. Phys. 11, 125007 (2009). 10.1088/1367-2630/11/12/125007
5. E. H. Nicollian and J. R. Brews, MOS Physics and Technology (Wiley, New York, 2003).
6. M. J. Uren, J. H. Stathis, and E. Cartier, J. Appl. Phys. 80, 3915 (1996). 10.1063/1.363349
7. C. C. Fulton, G. Lucovsky, and R. J. Nemanich, J. Appl. Phys. 99, 063708 (2006). 10.1063/1.2181282
8. J. J. Yeh and I. Lindau, At. Data Nucl. Data Tables 32, 1 (1985). 10.1016/0092-640X(85)90016-6
9. S. Tanuma, T. Shiratori, T. Kimura, K. Goto, S. Ichimura, and C. J. Powell, Surf. Interface Anal. 37, 833 (2005). 10.1002/sia.2102
10. J. F. Moulder and J. Chastain, Handbook of X-Ray Photoelectron Spectroscopy: A Reference Book of Standard Spectra for Identification and Interpretation of XPS Data (Eden Prairie, Perkin-Elmer Corp., 1992).
11. T. P. O'Regan, P. K. Hurley, B. Soree, and M. V. Fischetti, Appl. Phys. Lett. 96, 213514 (2010). 10.1063/1.3436645
12. A. Bahari, P. Morgen, and Z. S. Li, Surf. Sci. 600, 2966 (2006). 10.1016/j.susc.2006.05.017
13. M. Gaowei, E. M. Muller, A. K. Rumaiz, C. Weiland, E. Cockayne, J. Jordan-Sweet, J. Smedley, and J. C. Woicik, Appl. Phys. Lett. 100, 201606 (2012). 10.1063/1.4718028
14. B. E. Deal, M. Sklar, A. S. Grove, and E. H. Snow, J. Electrochem. Soc. 114, 266 (1967). 10.1149/1.2426565
15. D. R. Lide., CRC Handbook of Chemistry and Physics (CRC, Boca Raton, 2007).
16. L.-A. Ragnarsson and P. Lundgren, J. Appl. Phys. 88, 938 (2000). 10.1063/1.373759
17. K. Keunen, A. Stesmans, and V. V. Afanas'ev, Phys. Rev. B 84, 085329 (2011) 10.1103/PhysRevB.84.085329
18. G. J. Gerardi, E. H. Poindexter, M. E. Rueckel, P. J. Caplan, and N. M. Johnson, Appl. Phys. Lett. 49, 348 (1986). 10.1063/1.97611
19. J. R. Hauser and K. Ahmed, AIP Conf. Proc. 449, 235 (1998). 10.1063/1.56801
20. F. Lime, C. Guiducci, R. Clerc, G. Ghibaudo, C. Leroux, and T. Ernst, Solid-State Electron. 47, 1147 (2003). 10.1016/S0038-1101(03)00049-2
21. E. O'Connor, K. Cherkaoui, S. Monaghan, D. O'Connell, I. Povey, P. Casey, S. B. Newcomb, Y. Y. Gomeniuk, G. Provenzano, F. Crupi, G. Hughes, and P. K. Hurley, J. Appl. Phys. 111, 124104 (2012). 10.1063/1.4729331