Damage free laser ablation of SiO2 for local contact opening on silicon solar cells using an a-Si:H buffer layer

Journal of Applied Physics

Volumn 107, Issue 4, 2010, Pages

  Mangersnes, Krister ^a   Foss, Sean Erik ^a   Thøgersen, Annett ^a  

^a INSTITUTE FOR ENERGY TECHNOLOGY   (Norway)

Author keywords

[No Author keywords available]

Indexed keywords

532 NM LASER; A-SI:H; A-SPOTS; ABLATION THRESHOLDS; CHEMICAL VAPOR DEPOSITED; CONTACT OPENING; CRYSTALLINE SI; CRYSTALLINE SILICONS; CZ SILICON; DAMAGE-FREE; DIELECTRIC LAYER; DIODE-PUMPED; FLUENCES; GAUSSIANS; HIGH-EFFICIENCY SOLAR CELLS; IRRADIATED AREA; LASER FLUENCES; LONG PULSE; N TYPE SILICON; NANOSECOND PULSE; Q-SWITCHED; QUASI-STEADY-STATE PHOTOCONDUCTANCE; SATURATION CURRENT; SILICON LATTICES; SILICON SUBSTRATES; SURFACE PASSIVATION; THERMAL DISSIPATION;

ABLATION; BUFFER LAYERS; CHEMICAL VAPOR DEPOSITION; CRYSTAL STRUCTURE; CRYSTALLINE MATERIALS; ENERGY TRANSFER; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; PASSIVATION; PULSED LASER APPLICATIONS; PUMPING (LASER); SCANNING ELECTRON MICROSCOPY; SILICON COMPOUNDS; SILICON OXIDES; SILICON SOLAR CELLS; SOLAR CELLS;

SILICON;

EID: 77749283747     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3309382     Document Type: Article

References (28)

1. R. J. Schwartz and M. D. Lammert, 1975 International Electron Devices Meeting, Vol. 21, pp. 350-352.
2. E. Van Kerschaver and G. Beaucarne, Prog. Photovoltaics 1062-7995 14, 107 (2006). 10.1002/pip.657
3. A. G. Aberle, Prog. Photovoltaics 1062-7995 8, 473 (2000). 10.1002/1099-159X(200009/10)8:5<473::AID-PIP337>3.0.CO;2-D
4. A. Bentzen, A. Ulyashin, E. Sauar, D. Grambole, D. Wright, E. S. Marstein, B. Svensson, and A. Holt, 15th International Photovoltaic Science and Engineering Conference (Shanghai, China, 2005), pp. 316-317.
5. S. Gatz, H. Plagwitz, P. P. Altermatt, B. Terheiden, and R. Brendel, Appl. Phys. Lett. 0003-6951 93, 173502 (2008). 10.1063/1.3009571
6. B. Hoex, J. Schmidt, R. Bock, P. P. Altermatt, M. C. M. van de Sanden, and W. M. M. Kessels, Appl. Phys. Lett. 0003-6951 91, 112107 (2007). 10.1063/1.2784168 (Pubitemid 47415990)
7. P. Panek, K. Drabczyk, A. Fosca, and A. Slaoui, Mater. Sci. Eng., B 0921-5107 165, 64 (2009). 10.1016/j.mseb.2009.03.001
8. M. Schaper, J. Schmidt, H. Plagwitz, and R. Brendel, Prog. Photovoltaics 1062-7995 13, 381 (2005). 10.1002/pip.641
9. A. G. Ulyashin, A. Bentzen, S. Diplas, A. Suphellen, A. E. Gunnaes, A. Olsen, B. C. Svensson, E. S. Marstein, A. Holt, and D. Grambole, Fourth IEEE World Conference on Photovoltaic Energy Conversion (Waikoloa, Hawaii, 2006), Vol. 4, pp. 4.
10. P. Engelhart, S. Hermann, T. Neubere, H. Plagwitz, R. Grischke, R. Meyd, U. Klug, A. Schoonderbeek, U. Stute, and R. Brendel, Prog. Photovoltaics 1062-7995 15, 521 (2007). 10.1002/pip.758
11. P. Engelhart, N. P. Harder, R. Grischke, A. Merkle, R. Meyer, and R. Brendel, Prog. Photovoltaics 1062-7995 15, 237 (2007). 10.1002/pip.732
12. S. Hermann, T. Neubert, B. Wolpensinger, N. P. Harder, and R. Brendel, 23rd European Photovoltaic Solar Energy Conference (Valencia, Spain, 2008).
13. A. Knorz, M. Peters, A. Grohe, C. Harmel, and R. Prett, Prog. Photovoltaics 1062-7995 17, 127 (2009). 10.1002/pip.856
14. D. Bauerle, Laser Processing and Chemistry, 2nd ed. (Springer, Berlin, 1996).
15. H. R. Shanks, P. D. Maycock, P. H. Sidles, and G. C. Danielson, Phys. Rev. 0096-8250 130, 350 (1963). 10.1103/PhysRev.130.1743
16. P. Engelhart, R. Grischke, S. Eidelloth, R. Meyer, A. Schoonderbeek, U. Stute, A. Ostendorf, and R. Brendel, 25th International Congress on Applications of Lasers and Electro-Optics-ICALEO (Scottsdale, AZ, 2006).
17. K. Mangersnes and S. Foss, 24th European Photovoltaic Solar Energy Conference (Hamburg, Germany, 2009).
18. M. D. Abbott, Ph.D. thesis, University of New South Wales, Centre for Photovoltaic Engineering, 2006.
19. A. Cuevas, Sol. Energy Mater. Sol. Cells 0927-0248 57, 277 (1999). 10.1016/S0927-0248(98)00179-2
20. R. A. Sinton and A. Cuevas, Appl. Phys. Lett. 0003-6951 69, 2510 (1996). 10.1063/1.117723
21. R. A. Sinton, A. Cuevas, and M. Stuckings 25th IEEE Photovoltaic Specialists Conference, Washington, DC, 1996), pp. 457-460.
22. Silvaco-Atlas, http://www.silvaco.com/
23. R. K. Endo, Y. Fujihara, and M. Susa, High Temp.-High Press. 0018-1544 35/36, 505 (2003). 10.1068/htjr135
24. E. Matthias, M. Reichling, J. Siegel, O. W. Kading, S. Petzoldt, H. Skurk, P. Bizenberger, and E. Neske, Appl. Phys. A 0721-7250 58, 129 (1994). 10.1007/BF00332169
25. R. R. King, R. A. Sinton, and R. M. Swanson, IEEE Trans. Electron Devices 0018-9383 37, 365 (1990). 10.1109/16.46368 (Pubitemid 20666236)
26. R. R. King and R. M. Swanson, IEEE Trans. Electron Devices 0018-9383 38, 1399 (1991). 10.1109/16.81632 (Pubitemid 21662104)
27. A. Cuevas, P. A. Basore, G. Matlakowski, and C. Dubois, J. Appl. Phys. 0021-8979 80, 3370 (1996). 10.1063/1.363250
28. 2 " In Progress.