Finite element simulation of laser-induced diffusion in silicon

Energy Procedia

Volumn 8, Issue , 2011, Pages 587-591

  Poulaina, G ^a   Blanc, D ^a   Semmache, B ^b   Pellegrin, Y ^b   Lemiti, M ^a  

^a UNIVERSITÉ DE LYON   (France)

^b Semco Engineering   (France)

Author keywords

Dopant diffusion; Finite element; Laser doping; Phosphorus; Selective emitter; Silicon solar cell

Indexed keywords

DIFFUSION; DOPING (ADDITIVES); HEAT TRANSFER; PHOSPHORUS; SILICON; SILICON NITRIDE; SILICON SOLAR CELLS; SOLAR CELLS;

DOPANT DIFFUSION; FINITE ELEMENT SIMULATIONS; HEAT TRANSFER EQUATIONS; LASER DOPING; LASER INDUCED DIFFUSION; PHOSPHOSILICATE GLASS; SELECTIVE EMITTERS; SELF ALIGNED PROCESS;

FINITE ELEMENT METHOD;

EID: 80052082634     PISSN: 18766102     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1016/j.egypro.2011.06.187     Document Type: Conference Paper

References (6)

1. A. Ogane, K. Hirata, K. Horiuchi, Y. Nishihara, Y. Takahashi, A. Kitiyanan, et al., Laser-Doping Technique Using Ultraviolet Laser for Shallow Doping in Crystalline Silicon Solar Cell Fabrication, Japanese Journal Of Applied Physics. 48 (2009) 71201.
2. S.J. Eisele, T.C. Roder, J.R. Kohler, J.H. Werner, 18.9% efficient full area laser doped silicon solar cell, Applied Physics Letters. 95 (2009) 133501-133503.
3. J.R. Köhler, P. Grabitz, S.J. Eisele, T.C. Roder, J.H. Werner, Laser Doped Selective Emitters Yield 0.5% Efficiency Gain, in: 24th European PV Solar Energy Conference and Exhibition, Hamburg, 2009.
4. J.R. Köhler, S. Eisele, Influence of precursor layer ablation on laser doping of silicon, Progress In Photovoltaics: Research and Applications. 18 (2010) 334-339.
5. J. Hermann, M. Benfarah, S. Bruneau, E. Axente, G. Coustillier, T. Itina, et al., Comparative investigation of solar cell thin film processing using nanosecond and femtosecond lasers, Journal Of Physics D: Applied Physics. 39 (2006) 453-460. (Pubitemid 43136753)
6. V. Rana, Z. Zhang, C. Lazik, R. Mishra, T. Weidman, C. Eberspacher, Investigations into selective removal of silicon nitride using laser for crystalline silicon solar cells, in: 23rd European Photovoltaic Solar Energy Conference, Valence, 2008.