Metal-containing diamond-like nanocomposite thin film for advanced temperature sensors

Materials Science Forum

Volumn 475-479, Issue III, 2005, Pages 2079-2082

  Takeno, T ^a   Takagi, T ^a   Bozhko, A ^b   Shupegin, M ^c   Sato, T ^a  

^a TOHOKU UNIVERSITY   (Japan)

^b MOSCOW STATE UNIVERSITY   (Russian Federation)

^c MOSCOW POWER ENGINEERING INSTITUTE   (Russian Federation)

Author keywords

Diamond like; Metal; Nanocomposite; Temperature sensors

Indexed keywords

CARBON; DIAMONDS; ELECTRIC POTENTIAL; ELECTRON TUNNELING; ETCHING; MAGNETRON SPUTTERING; RAMAN SPECTROSCOPY; SILICON; THIN FILMS;

DIAMON-LIKE CARBON (DLC) FILMS; DIAMOND-LIKE; ELECTRON PROBE MICRO ANALYZERS (EPMA); TEMPERATURE SENSORS;

NANOSTRUCTURED MATERIALS;

EID: 17044395139     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/0-87849-960-1.2079     Document Type: Conference Paper

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