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Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 27, Issue 5, 2009, Pages 1204-1210

Modular ultrahigh vacuum-compatible gas-injection system with an adjustable gas flow for focused particle beam-induced deposition

(2) Klingenberger, D a Huth, M a

a GOETHE UNIVERSITY (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DESIGN PRINCIPLES; ENERGY DISPERSIVE X RAY SPECTROSCOPY; FOCAL AREA; GAS FLOWRATE; GAS FLOWS; GAS INJECTION SYSTEM; ORGANIC PRECURSOR; POWDERY SUBSTANCES; REPRODUCIBILITIES; SCANNING ELECTRON MICROSCOPE; VACUUM CHAMBERS;

ATOMIC FORCE MICROSCOPY; ATOMIC SPECTROSCOPY; DEPOSITS; FLOW OF GASES; GASES; GEOGRAPHIC INFORMATION SYSTEMS; PARTICLE BEAM DYNAMICS; PARTICLE BEAMS; PIEZOELECTRIC ACTUATORS; SCANNING ELECTRON MICROSCOPY; TUNGSTEN; ULTRAHIGH VACUUM; VACUUM DEPOSITION; X RAY SPECTROSCOPY;

INSULATING MATERIALS;

EID: 70349116867 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.3196789 Document Type: Article

Times cited : (6)

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