Modeling and demonstration of thermally stable high-sensitivity reproducible acoustic sensors

Journal of Microelectromechanical Systems

Volumn 21, Issue 6, 2012, Pages 1347-1356

  Akkaya, Onur Can ^a   Kilic, Onur ^b   Digonnet, Michel J F ^a   Kino, Gordon S ^a   Solgaard, Olav ^a  

^a STANFORD UNIVERSITY   (United States)

^b Johns Hopkins University   (United States)

Author keywords

Acoustic sensors; Fabry Perot (FP) interferometer; photonic crystal (PC) diaphragm; reproducibility; room temperature oxide bonding; temperature stability

Indexed keywords

ACOUSTIC DEVICES; DIAPHRAGMS; ELECTROMECHANICAL DEVICES; PHOTONIC CRYSTAL FIBERS; PHOTONIC CRYSTALS; SILICA; SILICATES; SILICON OXIDES; SILICON WAFERS; SINGLE CRYSTALS; SINGLE MODE FIBERS; SODIUM COMPOUNDS; THERMODYNAMIC STABILITY;

ACOUSTIC SENSORS; ELECTROMECHANICAL MODELING; FABRY-PEROT; HIGH REPRODUCIBILITY; POLARIZATION INDEPENDENT; REPRODUCIBILITIES; SINGLE CRYSTAL SILICON; TEMPERATURE STABILITY;

FABRY-PEROT INTERFEROMETERS;

EID: 84870526058     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2012.2196494     Document Type: Article

References (32)

1. L. Mohanty, L. M. Koh, and S. C. Tjin, "Fiber Bragg grating microphone system, " Appl. Phys. Lett., vol. 89, no. 16, pp. 1-3, Oct. 2006.
2. S. W. Løvseth, J. T. Kringlebotn, E. Rønnekleiv, and K. Bløtekjær, "Fiber distributed-feedback lasers used as acoustic sensors in air, " Appl. Opt., vol. 38, no. 22, pp. 4821-4830, Aug. 1999. (Pubitemid 129308148)
3. K. Kråkenes and K. Bløtekjaer, "Sagnac interferometer for underwater sound detection: Noise properties, " Opt. Lett., vol. 14, no. 20, pp. 1152-1154, Oct. 1989.
4. Y. Lu and A. Lal, "Photonic crystal based all-optical pressure sensor, " in Proc. 24th IEEE Int. Conf. MEMS, 2011, pp. 621-624.
5. T. K. Lim, Y. Zhou, Y. Lin, Y. M. Yip, and Y. L. Lam, "Fiber optic acoustic hydrophone with double Mach-Zehnder interferometers for optical path length compensation, " Opt. Commun., vol. 159, no. 4-6, pp. 301-308, Jan. 1999.
6. J. H. Cole, C. Kirkendall, A. Dandridge, G. Cogdell, and T. G. Giallorenzi, "Twenty-five years of interferometric fiber optic acoustic sensors at the Naval Research Laboratory, " J. Washington Acad. Sci., vol. 90, no. 3, pp. 40-57, 2004.
7. B. A. Ganji and B. Y. Majlis, "Design and fabrication of a new MEMS capacitive microphone using a perforated aluminum diaphragm, " Sens. Actuators A, Phys., vol. 149, no. 1, pp. 29-37, Jan. 2009.
8. A. Torkkeli, O. Rusanen, J. Saarilahti, H. Seppä, H. Sipola, and J. Hietanen, "Capacitive microphone with low-stress polysilicon membrane and high-stress polysilicon backplate, " Sens. Actuators A, Phys., vol. 85, no. 1-3, pp. 116-123, Aug. 2000.
9. S. E. U. Lima, O. Frazão, F. M. Araújo, L. A. Ferreira, V. Miranda, and J. L. Santos, "Extrinsic and intrinsic fiber optic interferometric sensors for acoustic detection in high-voltage environments, " Opt. Eng., vol. 48, no. 2, pp. 24 401-24 408, Feb. 2009.
10. W. Wang, N. Wu, Y. Tian, C. Niezrecki, and X. Wang, "Miniature all-silica optical fiber pressure sensor with an ultrathin uniform diaphragm, " Opt. Exp., vol. 18, no. 9, pp. 9006-9014, Apr. 2010.
11. W. Wang, N. Wu, Y. Tian, X. Wang, C. Niezrecki, and J. Chen, "Optical pressure/acoustic sensor with precise Fabry-Perot cavity length control using angle polished fiber, " Opt. Exp., vol. 17, no. 19, pp. 16 613-16 618, Sep. 2009.
12. S. E. U. Lima, O. Fraza, R. G. Farias, F. M. Araújo, L. A. Ferreira, V. Miranda, and J. L. Santos, "Intrinsic and extrinsic fiber Fabry-Perot sensors for acoustic detection in liquids, " Microw. Opt. Technol. Lett., vol. 52, no. 5, pp. 1129-1134, May 2010.
13. J. A. Bucaro, N. Lagakos, B. H. Houston, J. Jarzynski, and M. Zalalutdinov, "Miniature, high performance, low-cost fiber optic microphone, " J. Acoust. Soc. Amer., vol. 118, no. 3, pp. 1406-1413, Sep. 2005. (Pubitemid 41318574)
14. L. H. Chen, C. C. Chan, W. Yuan, S. K. Goh, and J. Sun, "High performance chitosan diaphragm based fiber optic acoustic sensor, " Sens. Actuators A, Phys., vol. 163, no. 1, pp. 42-47, Sep. 2010.
15. J. C. Xu, X. W. Wang, K. L. Cooper, and A. B. Wang, "Miniature all-silica fiber optic pressure and acoustic sensors, " Opt. Lett., vol. 30, no. 24, pp. 3269-3271, Dec. 2005. (Pubitemid 43099173)
16. M. Han, X. W. Wang, J. C. Xu, K. L. Cooper, and A. B. Wang, "Diaphragm based extrinsic Fabry-Perot interferometric optical fiber sensor for acoustic wave detection under high background pressure, " Opt. Eng., vol. 44, no. 6, pp. 060506-1-060506-2, Jun. 2005.
17. H. J. Konle, C. O. Paschereit, and I. Röhle, "A fiber-optical microphone based on a Fabry-Perot interferometer applied for thermo-acoustic measurements, " Meas. Sci. Technol., vol. 21, no. 1, pp. 015302-1-015302-8, Jan. 2010.
18. K. K. Chin, Y. Sun, G. Feng, G. E. Georgiou, K. Guo, E. Niver, H. Roman, and K. Noe, "Fabry-Perot diaphragm fiber-optic sensor, " Appl. Opt., vol. 46, no. 31, pp. 7614-7619, Nov. 2007. (Pubitemid 351183271)
19. O. Kilic, M. Digonnet, G. Kino, and O. Solgaard, "External fibre Fabry-Perot acoustic sensor based on a photonic-crystal mirror, " Meas. Sci. Technol., vol. 18, no. 10, pp. 3049-3054, Oct. 2007. (Pubitemid 350202718)
20. P. Morris, A. Hurrell, A. Shaw, E. Zhang, and P. Beard, "A Fabry-Pérot fiber-optic ultrasonic hydrophone for the simultaneous measurement of temperature and acoustic pressure, " J. Acoust. Soc. Amer., vol. 125, no. 6, pp. 3611-3622, Jun. 2009.
21. W. Zhaobi, M. Zhiying, Y. Huan, and L. Ming, "Research on the temperature compensation of optical fiber displacement sensor based on multi-sensor data fusion, " in Proc. 6th Int. Conf. Intell. Syst. Des. Appl., 2006, pp. 562-566.
22. O. C. Akkaya, O. Kilic, M. J. F. Digonnet, G. S. Kino, and O. Solgaard, "High-sensitivity thermally stable acoustic fiber sensor, " in Proc. IEEE Sens., 2010, pp. 1148-1151.
23. A. Kumar, P. Rudra, P. Fook, and S. Chau, "Analytical solution of the modified Reynolds equation for squeeze film damping in perforated MEMS structures, " Sens. Actuators A, Phys., vol. 135, no. 2, pp. 839-848, 2007.
24. O. Kiliç, M. Digonnet, G. Kino, and O. Solgaard, "Miniature photonic-crystal hydrophone optimized for ocean acoustics, " J. Acoust. Soc. Amer., vol. 129, no. 4, pp. 1837-1850, Apr. 2011.
25. K. E. Petersen, "Silicon as a mechanical material, " Proc. IEEE, vol. 70, no. 5, pp. 420-457, May 1982.
26. S. Sinha, K. E. Urbanek, A. Krzywicki, and R. L. Byer, "Investigation of suitability of silicate bonding for facet termination in active fiber devices, " Opt. Exp., vol. 15, no. 20, pp. 13 003-13 022, Oct. 2007.
27. S. Sivasankar and S. Chu, "Optical bonding using silica nanoparti-cle sol-gel chemistry, " Nano Lett., vol. 7, no. 10, pp. 3031-3034, Oct. 2007. (Pubitemid 350132925)
28. W. Kester, Mixed-Signal and DSP Design Techniques. Sydney, Australia: Newnes, 2003, p. 38.
29. L. L. Beranek, "Acoustics, " in Acoustic Society America. College Park, MD: Amer. Inst. Phys., 1986, pp. 62-69, 116-143.
30. J. Bergqvist, "Finite-element modeling and characterization of a silicon condenser microphone with a highly perforated backplate, " Sens. Actuators A, Phys., vol. 39, no. 3, pp. 191-200, 1993.
31. M. Pedersen, W. Olthuis, and P. Bergveld, "On the mechanical behavior of thin perforated plates and their application in silicon condenser microphones, " Sens. Actuators A, Phys., vol. 54, no. 1-3, pp. 499-504, 1996. (Pubitemid 126357001)
32. W. J. Wang, R. M. Lin, Q. B. Zou, and X. X. Li, "Modeling and characterization of a silicon condenser microphone, " J. Micromech. Microeng., vol. 14, no. 3, pp. 403-409, Mar. 2004.