Miniature, high performance, low-cost fiber optic microphone

Journal of the Acoustical Society of America

Volumn 118, Issue 3 I, 2005, Pages 1406-1413

  Bucaro, Joseph A ^a   Lagakos, Nicholas ^a   Houston, Brian H ^a   Jarzynski, Jacek ^b   Zalalutdinov, Maxim ^b  

^a NAVAL RESEARCH LABORATORY   (United States)

^b SFA INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COSTS; DIAPHRAGMS; FIBER OPTICS; FREQUENCIES; LIGHT SOURCES; MICROMACHINING; PRESSURE EFFECTS;

ACOUSTIC SCATTERING; BROADBAND RESPONSE; PRESSURE CHANGE; PSEUDOSTATIC PRESSURE;

MICROPHONES;

ACOUSTICS; AIR; ARTICLE; CALIBRATION; COST; FIBER OPTICS; LABORATORY; LIGHT; LIGHT EMITTING DIODE; MATHEMATICAL ANALYSIS; MEASUREMENT; MICROPHONE; NOISE; PRIORITY JOURNAL; SENSOR;

EID: 24944511190     PISSN: 00014966     EISSN: None     Source Type: Journal    
DOI: 10.1121/1.2000749     Document Type: Article

References (16)

1. Bickley, W. G. (1933). "Deflections and vibrations of a circular elastic plate under tensions," Philos. Mag. 15, 776-797.
2. Bucaro, J. A., and Lagakos, N. (2001). "Lightweight fiber optic microphones and accelerometers," Rev. Sci. Instrum. 72, 2816-2821.
3. Callen, H., and Welton, T. (1951). "Irreversibility and generalized noise," Phys. Rev. 83, 34-40.
4. Crandall, I. B. (1918). "The air damped vibrating system: Theoretical calibration of condenser transmitter," Phys. Rev. 11, 449-460.
5. Franca, D. R., and Blouin, A. (2004). "All optical measurement of in-plane and out-of-plane Young's modulus and Poisson's ratio in silicon wafers by means of vibration modes," Meas. Sci. Technol. 15, 859-868.
6. Gabrielson, T. B. (1993). "Mechanical thermal noise in micromachined acoustic and vibration sensors," IEEE Trans. Electron Devices 40, 903-909.
7. Hansen, S. T., Turo, A., Degertekin, F. L., and Khuri-Yakib, B. T. (2000). "Characterization of capacitive micromachined ultrasonic transducers in air using optical measurements," 2000 IEEE Ultrasonics Symposium, pp. 947-950.
8. He, G., and Cuomo, F. W. (1991). "Displacement response, detection limit, and dynamic range of fiber-optic lever sensors," J. Lightwave Technol. 9, 1618-1625.
9. He, G., and Cuomo, F. W. (1992). "The analysis of noises in a fiber optic microphone," J. Acoust. Soc. Am. 92, 2521-2526.
10. Hu, A, Cuomo, F. W., and Zuckerwar, A. J. (1992). "Theoretical and experimental study of a fiber optic microphone," J. Acoust. Soc. Am. 91, 3049-3056.
11. Lagakos, N., and Bucaro, J. A. (2001). "Fiber optic pressure and acceleration sensors," Proceedings of the 47th International Instr. Symposium Denver, CO, 6-10 May.
12. Scheeper, P. R., Olthius, W., and Bergveld, P. (1994). "Improvement of the performance of microphones with a silicon nitride diaphragm and back-plate," Sens. Actuators, A 40, 179-186.
13. Soedel, W. (1981). Vibrations of Shells and Plates, (Dekker, New York), pp 99-104.
14. Zuckerwar, J. (1978). "Theoretical response of condenser microphones," J. Acoust. Soc. Am. 64, 1278-1285.
15. Zuckerwar, A. J., Cuomo, F. W., Nguyen, T. D., Rizzi, S. A., and Clevenson, S. A. (1995). "High temperature fiber-optic lever microphone," J. Acoust. Soc. Am. 97, 3605-3616.
16. Zuckerwar, A. J., Kahn, T. R., and Serbyn, R. M. (2003). "Background noise in piezoelectric condenser, and ceramic microphone," J. Acoust. Soc. Am. 113, 3179-3187.