Photonic crystal based all-optical pressure sensor

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2011, Pages 621-624

  Lu, Yuerui ^a   Lal, Amit ^a  

^a School of Operations Research and Industrial Engineering   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALL-OPTICAL; CALIBRATION DATA; COLOR CHANGES; COLOR IMAGES; DEFLECTION ANGLES; OPTICAL WAVELENGTH; SILICON NANOWIRE ARRAYS;

CRYSTAL STRUCTURE; HYDROSTATIC PRESSURE; MECHANICAL ENGINEERING; MECHANICS; MEMS; PHOTONIC CRYSTALS; PRESSURE SENSORS; REACTIVE ION ETCHING; SEMICONDUCTING SILICON;

NANOWIRES;

EID: 79953768601     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2011.5734501     Document Type: Conference Paper

References (8)

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