Dielectric enhancement of BaSrTi1.1O3/BaSrTi 1.05O3/BaSrTiO3 multilayer thin films prepared by RF magnetron sputtering

Ceramics International

Volumn 39, Issue 2, 2013, Pages 1639-1643

  Xu, Zunping ^a,b   Yan, Dongxu ^a   Xiao, Dingquan ^a   Yu, Ping ^a   Zhu, Jianguo ^a  

^a SICHUAN UNIVERSITY   (China)

^b SOUTHWEST UNIVERSITY   (China)

Author keywords

A. Films; C. Dielectric properties; D. BaTiO3 and titanates

Indexed keywords

BATIO; BST THIN FILMS; CRACK-FREE SURFACES; DIELECTRIC ENHANCEMENT; DIELECTRIC TUNABILITY; MULTI-LAYER THIN FILM; PEROVSKITE STRUCTURES; RADIO FREQUENCY MAGNETRON SPUTTERING; RF-MAGNETRON SPUTTERING; SUBSTRATE TEMPERATURE;

ATOMIC FORCE MICROSCOPY; DIELECTRIC DEVICES; DIELECTRIC LOSSES; MAGNETRON SPUTTERING; MULTILAYERS; PEROVSKITE; SCANNING ELECTRON MICROSCOPY; SUBSTRATES; X RAY DIFFRACTION;

FILM PREPARATION;

EID: 84870294179     PISSN: 02728842     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ceramint.2012.08.006     Document Type: Article

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