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Volumn , Issue , 2011, Pages 335-356

Silica Membranes - Preparation by Chemical Vapour Deposition and Characteristics

Author keywords

Atmospheric pressure chemical vapour deposition (APCVD); Chemical vapour deposition (CVD) condensation of precursor compound, or compounds from gas phase onto a substrate, producing a solid deposit; CVD apparatus consisting of basic components; Hydrothermal stability of a Canmet ENERGY silica H membranes; Microporous silica hydrogen perm selective membranes (H membranes) potentially more practical alternative to Pd membranes; Silica membrane application; Silica membrane structure and transport mechanism; Silica membranes preparation by chemical vapour deposition and characteristics; TEOS thermal decomposition mechanism leading to silica film formation; Water Gas Shift Reaction (WGSR) and membrane assisted WGSR

Indexed keywords


EID: 84870290695     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1002/9780470977569.ch12     Document Type: Chapter
Times cited : (4)

References (105)
  • 2
    • 0005597844 scopus 로고
    • Apparatus for Separating Gases
    • US Patent 1174631
    • W.O. Snelling, Apparatus for Separating Gases, US Patent 1174631 (1916).
    • (1916)
    • Snelling, W.O.1
  • 3
    • 84885738478 scopus 로고    scopus 로고
    • Advanced hydrogen separation via thin supported Pd membranes
    • in Hydrogen Energy Progress XI, 1
    • J.S.C. Booth, M.L. Doyle, S.M. Miller, L.A. Scholtz and P.A. Walker, Advanced hydrogen separation via thin supported Pd membranes, in Hydrogen Energy Progress XI, 1 (1996).
    • (1996)
    • Booth, J.S.C.1    Doyle, M.L.2    Miller, S.M.3    Scholtz, L.A.4    Walker, P.A.5
  • 4
    • 41449088913 scopus 로고    scopus 로고
    • Synthesis, characterization, and application of palladium membranes, in Membrane Science and Technology, 13, Inorganic Membranes: Synthesis,
    • R. Mallada and M. Menendez (eds), Elsevier B.V., Rotterdam
    • A. Basile, F. Gallucci and S. Tosti, Synthesis, characterization, and application of palladium membranes, in Membrane Science and Technology, 13, Inorganic Membranes: Synthesis, Characterization and Applications, R. Mallada and M. Menendez (eds), Elsevier B.V., Rotterdam (2008).
    • (2008) Characterization and Applications
    • Basile, A.1    Gallucci, F.2    Tosti, S.3
  • 5
    • 41549086250 scopus 로고    scopus 로고
    • Microporous silica membrane: basic principles and recent advances, in Membrane Science and Technology Series, 13, Inorganic Membranes: Synthesis, Characterization and Applications
    • R. Mallada and M. Menendez (eds), Elsevier B.V., Rotterdam
    • A. Ayral, A. Julbe, V. Rouessac, S. Rousaldes and J. Dureand, Microporous silica membrane: basic principles and recent advances, in Membrane Science and Technology Series, 13, Inorganic Membranes: Synthesis, Characterization and Applications, R. Mallada and M. Menendez (eds), Elsevier B.V., Rotterdam (2008).
    • (2008)
    • Ayral, A.1    Julbe, A.2    Rouessac, V.3    Rousaldes, S.4    Dureand, J.5
  • 6
    • 84885743044 scopus 로고    scopus 로고
    • Chemical Vapour Deposition
    • JohnWiley& Sons, Inc., New York
    • C.F. Powell, J.H. Oxley and J.M. Blocher, Jr., (eds), Chemical Vapour Deposition, JohnWiley& Sons, Inc., New York (1996).
    • (1996)
    • Powell, C.F.1    Oxley, J.H.2    Blocher, J.M.3
  • 7
    • 0003477452 scopus 로고    scopus 로고
    • Handbook of Chemical Vapour Deposition (CVD), 2nd edn
    • Noyes Publications/ William Andrew Publishing, Norwich, New York
    • H.O. Pierson, Handbook of Chemical Vapour Deposition (CVD), 2nd edn, Noyes Publications/ William Andrew Publishing, Norwich, New York (1999).
    • (1999)
    • Pierson, H.O.1
  • 8
    • 84915940090 scopus 로고
    • Synthesis of SiO2 Membrane on Porous Support and Method of Use of Same
    • G.R. Gavalas and C. Megiris, Synthesis of SiO2 Membrane on Porous Support and Method of Use of Same, US Patent 4,902,307 (1990).
    • (1990) US Patent , vol.4902 , pp. 307
    • Gavalas, G.R.1    Megiris, C.2
  • 9
    • 84885721472 scopus 로고
    • New developments in hydrogen permselective membranes (US DOE Contract No. DE-AC21-90MC26365) Proceedings of the Coal-Fired Power Systems 94
    • Advances in IGCC and PFBC Review Meeting
    • G.R. Gavalas, R.A. Johnson and V.K. Venkataraman, New developments in hydrogen permselective membranes (US DOE Contract No. DE-AC21-90MC26365) Proceedings of the Coal-Fired Power Systems 94, Advances in IGCC and PFBC Review Meeting, 2 (1994).
    • (1994) , vol.2
    • Gavalas G.R1    Johnson, R.A.2    Venkataraman, V.K.3
  • 10
    • 0028496804 scopus 로고
    • Hydrogen-permselective SiO2 membrane formed in pores of alumina support tube by chemical vapor deposition with tetraethylorthosilicate
    • S. Yan, H. Maeda, K. Kusakabe, S. Morooka and Y. Akiyama, Hydrogen-permselective SiO2 membrane formed in pores of alumina support tube by chemical vapor deposition with tetraethylorthosilicate, Industrial and Engineering Chemistry Research, 33, 2096-2101 (1994).
    • (1994) Industrial and Engineering Chemistry Research , vol.33 , pp. 2096-2101
    • Yan, S.1    Maeda, H.2    Kusakabe, K.3    Morooka, S.4    Akiyama, Y.5
  • 11
    • 0000489210 scopus 로고
    • Challenges in membrane catalysis
    • J.N. Armor, Challenges in membrane catalysis, Chemtech, 9, 557-563 (1992).
    • (1992) Chemtech , vol.9 , pp. 557-563
    • Armor, J.N.1
  • 12
    • 0028433810 scopus 로고
    • Catalytic inorganic membrane reactors: Present experience and future opportunities, Catalysis Reviews
    • G. Sarraco and V. Specchia, Catalytic inorganic membrane reactors: Present experience and future opportunities, Catalysis Reviews, Science and Engineering, 36(2), 305-384 (1994).
    • (1994) Science and Engineering , vol.36 , Issue.2 , pp. 305-384
    • Sarraco, G.1    Specchia, V.2
  • 15
    • 84885722221 scopus 로고    scopus 로고
    • General overview, trends and prospects
    • in Fundamentals of Inorganic Membrane Science and Technology, A.J. Burgraffand L. Cot (eds), Elsevier, Amsterdam
    • A.J. Burggraaf and L. Cot, General overview, trends and prospects, in Fundamentals of Inorganic Membrane Science and Technology, A.J. Burgraffand L. Cot (eds), Elsevier, Amsterdam (1996).
    • (1996)
    • Burggraaf, A.J.1    Cot, L.2
  • 16
    • 0024884514 scopus 로고
    • Deposition of hydrogen perm-selective silica films
    • G.R. Gavalas, C. Megiris and S.W. Nam, Deposition of hydrogen perm-selective silica films, Chemical Engineering Science, 44(9), 1829-1835 (1989).
    • (1989) Chemical Engineering Science , vol.44 , Issue.9 , pp. 1829-1835
    • Gavalas, G.R.1    Megiris, C.2    Nam, S.W.3
  • 21
    • 84885792010 scopus 로고    scopus 로고
    • High-Flux Silica Membranes for Gas Separation: Synthesis
    • High-Selectivity,ISBN 90 365 11410
    • R.M. de Vos, High-Selectivity, High-Flux Silica Membranes for Gas Separation: Synthesis, Transport and Stability, Thesis Enschede, ISBN 90 365 11410 (1999).
    • (1999) Transport and Stability Thesis Enschede
    • de Vos, R.M.1
  • 22
    • 0002647412 scopus 로고    scopus 로고
    • Sol-gel derived silica membranes for separation of hydrogen at high temperature - separation performance and stability against steam
    • M. Asaeda and M. Kashimoto, Sol-gel derived silica membranes for separation of hydrogen at high temperature - separation performance and stability against steam, Proc. Int. Conf. Inorg. Membr., 5, 172 (1998).
    • (1998) Proc. Int. Conf. Inorg. Membr. , vol.5 , pp. 172
    • Asaeda, M.1    Kashimoto, M.2
  • 24
    • 0029210179 scopus 로고
    • Preparation of H2 permselective silica membranes by alternating reactant vapor deposition
    • S. Kim and G.R. Gavalas, Preparation of H2 permselective silica membranes by alternating reactant vapor deposition, Industrial and Engineering Chemistry Research, 34, 168-176 (1995).
    • (1995) Industrial and Engineering Chemistry Research , vol.34 , pp. 168-176
    • Kim, S.1    Gavalas, G.R.2
  • 25
    • 0017516948 scopus 로고
    • The fundamentals of chemical vapour deposition
    • Review
    • W.A. Bryant, Review, The fundamentals of chemical vapour deposition, Journal of Material Science, 12, 1285-1306 (1977).
    • (1977) Journal of Material Science , vol.12 , pp. 1285-1306
    • Bryant, W.A.1
  • 27
    • 70350573416 scopus 로고    scopus 로고
    • Chemical Vapour Deposition, Precursors,
    • A.C. Jonesand M.L. Hitchman (eds), RSC Publishing, London
    • Chemical Vapour Deposition, Precursors, Processes and Applications, A.C. Jonesand M.L. Hitchman (eds), RSC Publishing, London (2009).
    • (2009) Processes and Applications
  • 28
    • 0029252979 scopus 로고
    • Low pressure chemical vapor deposition of silicon dioxide films by thermal decomposition of tetra-alkoxysilanes
    • E.J. Kim and W.N. Gill, Low pressure chemical vapor deposition of silicon dioxide films by thermal decomposition of tetra-alkoxysilanes, Journal of the Electrochemical Society, 142(2), 976-682 (1995).
    • (1995) Journal of the Electrochemical Society , vol.142 , Issue.2 , pp. 976-682
    • Kim, E.J.1    Gill, W.N.2
  • 29
    • 67650757704 scopus 로고    scopus 로고
    • Performance under thermal and hydrothermal condition of amorphous silica membrane prepared by chemical vapor deposition
    • K. Akamatsu, M. Nakane, T. Sugawara and S. Nakao, Performance under thermal and hydrothermal condition of amorphous silica membrane prepared by chemical vapor deposition, AIChE J., 55 (8), 2197-2200 (2009).
    • (2009) AIChE J. , vol.55 , Issue.8 , pp. 2197-2200
    • Akamatsu, K.1    Nakane, M.2    Sugawara, T.3    Nakao, S.4
  • 30
    • 33846827254 scopus 로고    scopus 로고
    • characterization and gas permeation properties of a silica membrane prepared by high-pressure chemical vapor deposition
    • Synthesis
    • S. Araki, N. Mohri, Y. Yoshimitsu and Y. Miyake, Synthesis, characterization and gas permeation properties of a silica membrane prepared by high-pressure chemical vapor deposition, Journal of Membrane Science, 290, 138-145 (2007).
    • (2007) Journal of Membrane Science , vol.290 , pp. 138-145
    • Araki, S.1    Mohri, N.2    Yoshimitsu, Y.3    Miyake, Y.4
  • 31
    • 33746556855 scopus 로고    scopus 로고
    • Preparation of a multi-membrane module for high-temperature hydrogen separation
    • S. Gopalakrishman, M. Nomura, T. Sugawara and S. Nakao, Preparation of a multi-membrane module for high-temperature hydrogen separation, Desalination, 193, 230-235 (2006).
    • (2006) Desalination , vol.193 , pp. 230-235
    • Gopalakrishman, S.1    Nomura, M.2    Sugawara, T.3    Nakao, S.4
  • 33
    • 1242315433 scopus 로고    scopus 로고
    • and gas permeation properties of a hydrogen permeable silica membrane supported on porous alumina
    • Synthesis, characterization,
    • D. Lee, L. Zhang, S.T. Oyama, S. Niu and R.F. Saraf, Synthesis, characterization, and gas permeation properties of a hydrogen permeable silica membrane supported on porous alumina, Journal of Membrane Science, 231, 117-126 (2004).
    • (2004) Journal of Membrane Science , vol.231 , pp. 117-126
    • Lee, D.1    Zhang, L.2    Oyama, S.T.3    Niu, S.4    Saraf, R.F.5
  • 34
    • 38649130179 scopus 로고    scopus 로고
    • Hydrothermally stable silica-alumina composite membranes for hydrogen separation
    • Y. Gu, P. Hacarlioglu and S.T. Oyama, Hydrothermally stable silica-alumina composite membranes for hydrogen separation, Journal of Membrane Science, 310, 28-37 (2008).
    • (2008) Journal of Membrane Science , vol.310 , pp. 28-37
    • Gu, Y.1    Hacarlioglu, P.2    Oyama, S.T.3
  • 36
    • 0035640911 scopus 로고    scopus 로고
    • Gas permeation characteristics of silica/alumina composite membrane prepared by chemical vapour deposition
    • S.-S. Kim and B.-K. Sea, Gas permeation characteristics of silica/alumina composite membrane prepared by chemical vapour deposition, Korean Journal of Chemical Engineering, 18(3), 322-329 (2001).
    • (2001) Korean Journal of Chemical Engineering , vol.18 , Issue.3 , pp. 322-329
    • Kim, S.-S.1    Sea, B.-K.2
  • 37
    • 0037446086 scopus 로고    scopus 로고
    • Stability of a silica membrane prepared by CVD using gamma- and alpha-alumina tube as the support tube in the HI-H2O gaseous mixture
    • G.-J. Hwang, J.-W. Kim, H.-S. Choi and K. Onuki, Stability of a silica membrane prepared by CVD using gamma- and alpha-alumina tube as the support tube in the HI-H2O gaseous mixture, Journal of Membrane Science, 215, 293-302 (2003).
    • (2003) Journal of Membrane Science , vol.215 , pp. 293-302
    • Hwang, G.-J.1    Kim, J.-W.2    Choi, H.-S.3    Onuki, K.4
  • 38
    • 0024621292 scopus 로고
    • Introduction of specific gas selectivity to porous glass membranes by treatment with tetraethoxysilane
    • T. Okubo and H. Inoue, Introduction of specific gas selectivity to porous glass membranes by treatment with tetraethoxysilane, Journal of Membrane Science, 42, 109-117 (1989).
    • (1989) Journal of Membrane Science , vol.42 , pp. 109-117
    • Okubo, T.1    Inoue, H.2
  • 39
    • 0026241859 scopus 로고
    • Relative stabilities of tetramethylorthosilicate and tetraethylorthosilicate in the gas phase
    • J.C.S. Chu, J. Breslin, N.S. Wang and M.C. Lin, Relative stabilities of tetramethylorthosilicate and tetraethylorthosilicate in the gas phase, Materials Letters 12(3), 179-184 (1991).
    • (1991) Materials Letters , vol.12 , Issue.3 , pp. 179-184
    • Chu, J.C.S.1    Breslin, J.2    Wang, N.S.3    Lin, M.C.4
  • 40
    • 41949141815 scopus 로고    scopus 로고
    • Development of pore size-controlled silica membranes for gas separation by chemical vapour deposition
    • Y. Ohta, K. Akamatsu, T. Sugawara, A. Nakao, A. Miyoshi, and S.I. Nakao, Development of pore size-controlled silica membranes for gas separation by chemical vapour deposition, Journal of Membrane Science, 315, 93-99 (2008).
    • (2008) Journal of Membrane Science , vol.315 , pp. 93-99
    • Ohta, Y.1    Akamatsu, K.2    Sugawara, T.3    Nakao, A.4    Miyoshi, A.5    Nakao, S.I.6
  • 41
    • 37849013247 scopus 로고    scopus 로고
    • Relationship between the mesoporous intermediate layer structure and the gas permeation property of an amorphous silica membrane synthesized by counter diffusion chemical vapor deposition
    • T. Nagano, S. Fjjisaki, K. Sato, K. Hatay and Y. Iwamoto, Relationship between the mesoporous intermediate layer structure and the gas permeation property of an amorphous silica membrane synthesized by counter diffusion chemical vapor deposition, Journal of the American Ceramic Society, 91(1), 71-76 (2008).
    • (2008) Journal of the American Ceramic Society , vol.91 , Issue.1 , pp. 71-76
    • Nagano, T.1    Fjjisaki, S.2    Sato, K.3    Hatay, K.4    Iwamoto, Y.5
  • 44
    • 15244343867 scopus 로고    scopus 로고
    • Preparation of a stable silica membrane by a counter diffusion chemical vapour deposition method
    • M. Nomura, K. Ono, S. Gopalakrishnan, T. Sugawara and S.-I. Nakao, Preparation of a stable silica membrane by a counter diffusion chemical vapour deposition method, Journal of Membrane Science, 251, 151-158 (2005).
    • (2005) Journal of Membrane Science , vol.251 , pp. 151-158
    • Nomura, M.1    Ono, K.2    Gopalakrishnan, S.3    Sugawara, T.4    Nakao, S.-I.5
  • 46
    • 54949142872 scopus 로고    scopus 로고
    • Development of an allceramic module with silica membrane tubes for high temperature hydrogen separation
    • Y. Yoshino, T. Suzuki, T. Hisatomi, M. Nomura, S.-I. Nakao and N. Itoh, Development of an allceramic module with silica membrane tubes for high temperature hydrogen separation, Separation Science and Technology, 43, 3432-3447 (2008).
    • (2008) Separation Science and Technology , vol.43 , pp. 3432-3447
    • Yoshino, Y.1    Suzuki, T.2    Hisatomi, T.3    Nomura, M.4    Nakao, S.-I.5    Itoh, N.6
  • 47
    • 0027906698 scopus 로고
    • Chemical vapour deposition of hydrogenpermselective silica films on porous glass supports from tetraethylorthosilicate
    • H.Y. Ha, S.W. Nam, S.-A. Hong and W.K. Lee, Chemical vapour deposition of hydrogenpermselective silica films on porous glass supports from tetraethylorthosilicate, Journal of Membrane Science, 85, 279-290 (1993).
    • (1993) Journal of Membrane Science , vol.85 , pp. 279-290
    • Ha, H.Y.1    Nam, S.W.2    Hong, S.-A.3    Lee, W.K.4
  • 48
    • 0035482074 scopus 로고    scopus 로고
    • Methanol vapour separation through the silica membrane prepared by the CVD method with the aid of evacuation
    • K. Kuraoka, T. Kakitani, T. Suetsugu and T. Yazawa, Methanol vapour separation through the silica membrane prepared by the CVD method with the aid of evacuation, Separation and Purification Technology, 25, 161-166 (2001).
    • (2001) Separation and Purification Technology , vol.25 , pp. 161-166
    • Kuraoka, K.1    Kakitani, T.2    Suetsugu, T.3    Yazawa, T.4
  • 49
    • 0035787539 scopus 로고    scopus 로고
    • Methane to syngas: development of non-coking catalyst and hydrogenpermselective membrane
    • in Studies in Surface Science and Catalysis, 136, Natural Gas Conversion VI, E. Iglesia, J. J. Spiveyand T. H. Fleish (eds), Proceedings of the 6th Natural Gas Conversion Symposium, Alaska Elsevier 2001
    • J. Galuszka and D. Liu, Methane to syngas: development of non-coking catalyst and hydrogenpermselective membrane, in Studies in Surface Science and Catalysis, 136, Natural Gas Conversion VI, E. Iglesia, J. J. Spiveyand T. H. Fleish (eds), Proceedings of the 6th Natural Gas Conversion Symposium, Alaska, 2001, 363-368, Elsevier (2001).
    • (2001) , pp. 363-368
    • Galuszka, J.1    Liu, D.2
  • 50
    • 84885711648 scopus 로고    scopus 로고
    • Silica H-membrane thermal and hydrothermal stability
    • in Proceedings of the 9th International Conference on Inorganic Membranes, ICIM9 R. Bredesen and H. Raeder (eds), Lillehammer
    • J. Galuszka, T. Giddings and I. Clelland, Silica H-membrane thermal and hydrothermal stability, in Proceedings of the 9th International Conference on Inorganic Membranes, ICIM9 R. Bredesen and H. Raeder (eds), Lillehammer (2006).
    • (2006)
    • Galuszka, J.1    Giddings, T.2    Clelland, I.3
  • 51
    • 67849121046 scopus 로고    scopus 로고
    • Design of silica networks for development of highly permeable hydrogen separation membranes with hydrothermal Stability
    • M. Kanezashi, K. Yada, T. Yoshioka and T. Tsuru, Design of silica networks for development of highly permeable hydrogen separation membranes with hydrothermal Stability, Journal of the American Chemical Society 131, 414-415 (2009).
    • (2009) Journal of the American Chemical Society , vol.131 , pp. 414-415
    • Kanezashi, M.1    Yada, K.2    Yoshioka, T.3    Tsuru, T.4
  • 52
    • 44249120030 scopus 로고    scopus 로고
    • Hydrothermal stability of microporous silica and niobia-silica membranes
    • V. Boffa, D.H.A. Blank and J.E. ten Elshof, Hydrothermal stability of microporous silica and niobia-silica membranes, Journal of Membrane Science, 319, 256-263 (2008).
    • (2008) Journal of Membrane Science , vol.319 , pp. 256-263
    • Boffa, V.1    Blank, D.H.A.2    Ten Elshof, J.E.3
  • 53
    • 30944451336 scopus 로고    scopus 로고
    • Hydrogen permeation characteristics and stability of Ni-Doped silica membranes in steam at high temperature
    • M. Kanezashi and M. Asaeda, Hydrogen permeation characteristics and stability of Ni-Doped silica membranes in steam at high temperature, Journal of Membrane Science, 271, 86-93 (2006).
    • (2006) Journal of Membrane Science , vol.271 , pp. 86-93
    • Kanezashi, M.1    Asaeda, M.2
  • 55
    • 0037114035 scopus 로고    scopus 로고
    • Gas permeation characteristics of a hydrogen selective hydrogen permeable silica membrane
    • D. Lee and S.T. Oyama, Gas permeation characteristics of a hydrogen selective hydrogen permeable silica membrane, Journal of Membrane Science, 210, 291-306 (2002).
    • (2002) Journal of Membrane Science , vol.210 , pp. 291-306
    • Lee, D.1    Oyama, S.T.2
  • 56
    • 0001204464 scopus 로고
    • Solution and diffusion of helium and neon in tridymite and cristobalite
    • R.M. Barrer and D.E.W. Vaughan, Solution and diffusion of helium and neon in tridymite and cristobalite, Transactions of the Faraday Society, 63, 2275-2290 (1967).
    • (1967) Transactions of the Faraday Society , vol.63 , pp. 2275-2290
    • Barrer, R.M.1    Vaughan, D.E.W.2
  • 57
    • 0003397058 scopus 로고
    • Characterization and Chemical Modification of the Silica Surface
    • Studies in Surface Science and Catalysis, 93, Elsevier Science B.V., Rotterdam
    • E.F. Vansant, P. Voort and K.C. Vrancken, Characterization and Chemical Modification of the Silica Surface, Studies in Surface Science and Catalysis, 93, Elsevier Science B.V., Rotterdam (1995).
    • (1995)
    • Vansant, E.F.1    Voort, P.2    Vrancken, K.C.3
  • 58
    • 0003934959 scopus 로고
    • The Chemistry of Silica; Solubility
    • Polymerization, Colloid and Surface Properties and Biochemistry, John Wiley & Sons, Inc., New York
    • R.K. Iler, The Chemistry of Silica; Solubility, Polymerization, Colloid and Surface Properties and Biochemistry, John Wiley & Sons, Inc., New York (1979).
    • (1979)
    • Iler, R.K.1
  • 61
    • 0000316773 scopus 로고    scopus 로고
    • Significant densification of sol-gel derived amorphous silica films by vacuum ultraviolet irradiation
    • H. Imai, M.Yasumori, H. Hirashima, K.Awazu and H. Onuki, Significant densification of sol-gel derived amorphous silica films by vacuum ultraviolet irradiation, Journal of Applied Physics, 79 (11), 8304-8309 (1996).
    • (1996) Journal of Applied Physics , vol.79 , Issue.11 , pp. 8304-8309
    • Imai, H.1    Yasumori, M.2    Hirashima, H.3    Awazu, K.4    Onuki, H.5
  • 62
    • 0027908370 scopus 로고
    • The sol-gel approach to prepare candidate microporous inorganic membranes for membrane reactor
    • A. Julbe, C. Guizard, A. Larbot, L. Cot and A. Giroir-Fendler, The sol-gel approach to prepare candidate microporous inorganic membranes for membrane reactor, Journal of Membrane Science, 77, 137-153 (1993).
    • (1993) Journal of Membrane Science , vol.77 , pp. 137-153
    • Julbe, A.1    Guizard, C.2    Larbot, A.3    Cot, L.4    Giroir-Fendler, A.5
  • 65
    • 0024739805 scopus 로고
    • Decomposition chemistry of tetraethoxysilane
    • S.B. Desu, Decomposition chemistry of tetraethoxysilane, Journal of the American Ceramic Society, 72(9), 1615-1621 (1989).
    • (1989) Journal of the American Ceramic Society , vol.72 , Issue.9 , pp. 1615-1621
    • Desu, S.B.1
  • 66
    • 0029274219 scopus 로고
    • Gas phase synthesis of fine silica particles by oxidation of tetraethylorthosilicate vapour
    • J. Smolik and P. Moravec, Gas phase synthesis of fine silica particles by oxidation of tetraethylorthosilicate vapour, Journal of Materials Science Letters, 14, 387-389 (1995).
    • (1995) Journal of Materials Science Letters , vol.14 , pp. 387-389
    • Smolik, J.1    Moravec, P.2
  • 67
    • 0343450305 scopus 로고    scopus 로고
    • Role of gas phase reactions in subatmospheric chemical-vapor deposition ozone/TEOS processes for oxide deposition
    • I.A. Shareef, G.W. Rubloff and W.N. Gill, Role of gas phase reactions in subatmospheric chemical-vapor deposition ozone/TEOS processes for oxide deposition, Journal of Vacuum Science and Technology B, 14(2), 772-774 (1996).
    • (1996) Journal of Vacuum Science and Technology B , vol.14 , Issue.2 , pp. 772-774
    • Shareef, I.A.1    Rubloff, G.W.2    Gill, W.N.3
  • 68
    • 0037908646 scopus 로고    scopus 로고
    • Performance of hydrophobic and hydrophilic silica membrane reactors for the water gas shift reaction
    • S. Giessler, L. Jordan, J.C. Diniz da Costa and G.Q. (Max) Lu, Performance of hydrophobic and hydrophilic silica membrane reactors for the water gas shift reaction, Separation and Purification Technology, 32, 255-264 (2003).
    • (2003) Separation and Purification Technology , vol.32 , pp. 255-264
    • Giessler, S.1    Jordan, L.2    Diniz da Costa, J.C.3    Lu, G.Q.4
  • 69
    • 70350064419 scopus 로고    scopus 로고
    • Permeation properties and hydrothermal stability of silica-titania membranes supported on porous alumina substrates
    • Y. Gu and S.T. Oyama, Permeation properties and hydrothermal stability of silica-titania membranes supported on porous alumina substrates, Journal of Membrane Science, 345, 267-275 (2009).
    • (2009) Journal of Membrane Science , vol.345 , pp. 267-275
    • Gu, Y.1    Oyama, S.T.2
  • 71
    • 84882309608 scopus 로고    scopus 로고
    • Silica membranes for hydrogen fuel production by membrane water gas shift reaction and development of a mathematical model for a membrane reactor
    • in Carbon Dioxide Capture for Storage. in Deep Geologic Formations, David C. Thomas (ed.), Elsevier, B.V., Rotterdam
    • P.P.A.C. Pex and Y.C. van Delft, Silica membranes for hydrogen fuel production by membrane water gas shift reaction and development of a mathematical model for a membrane reactor, in Carbon Dioxide Capture for Storage. in Deep Geologic Formations, David C. Thomas (ed.), Elsevier, B.V., Rotterdam (2005).
    • (2005)
    • Pex, P.P.A.C.1    van Delft, Y.C.2
  • 73
    • 33746766199 scopus 로고    scopus 로고
    • Synthesis of a mesoporous titania/silica and its application to a composite membrane with high hydrothermal stability
    • D.-W. Lee, S.-K. Ihm and K.-H. Lee, Synthesis of a mesoporous titania/silica and its application to a composite membrane with high hydrothermal stability, Desalination, 199, 363-364 (2006).
    • (2006) Desalination , vol.199 , pp. 363-364
    • Lee, D.-W.1    Ihm, S.-K.2    Lee, K.-H.3
  • 74
    • 0028986415 scopus 로고
    • Formation and characterization of supported microporous ceramic membranes prepared by sol-gel modification techniques
    • R.S.A. de Lange, J.H.A. Hekkink, K.Keizer and A.J. Burggraaf, Formation and characterization of supported microporous ceramic membranes prepared by sol-gel modification techniques, Journal of Membrane Science, 99, 57-75 (1995).
    • (1995) Journal of Membrane Science , vol.99 , pp. 57-75
    • De Lange, R.S.A.1    Hekkink, J.H.A.2    Keizer, K.3    Burggraaf, A.J.4
  • 75
    • 0035297547 scopus 로고    scopus 로고
    • Hydrothermal stability and performance of silica-zirconia membranes for hydrogen separation in hydrothermal Conditions
    • K.Yoshida,Y. Hirano, H. Fuji, T. Tsuru and M. Asaeda, Hydrothermal stability and performance of silica-zirconia membranes for hydrogen separation in hydrothermal Conditions, Journal of Chemical Engineering of Japan, 34(4), 523-530 (2001).
    • (2001) Journal of Chemical Engineering of Japan , vol.34 , Issue.4 , pp. 523-530
    • Yoshida, K.1    Hirano, Y.2    Fuji, H.3    Tsuru, T.4    Asaeda, M.5
  • 77
    • 0036827216 scopus 로고    scopus 로고
    • Stability and performance of porous silicazirconia composite membranes for pervaporation of aqueous organic solutions
    • M. Asaeda, Y. Sakou, J. Yang and K. Shimasaki, Stability and performance of porous silicazirconia composite membranes for pervaporation of aqueous organic solutions, Journal of Membrane Science, 209, 163-175 (2002).
    • (2002) Journal of Membrane Science , vol.209 , pp. 163-175
    • Asaeda, M.1    Sakou, Y.2    Yang, J.3    Shimasaki, K.4
  • 78
    • 0029321523 scopus 로고
    • Hydrothermal stability of pure and modified microporous silica membranes
    • G.P. Fotou,Y.S. Lin and S.E. Pratsinis, Hydrothermal stability of pure and modified microporous silica membranes, Journal of Materials Science, 30, 2803-2808 (1995).
    • (1995) Journal of Materials Science , vol.30 , pp. 2803-2808
    • Fotou, G.P.1    Lin, Y.S.2    Pratsinis, S.E.3
  • 79
    • 51149083682 scopus 로고    scopus 로고
    • Characterization of Co doped silica for improved hydrothermal stability and application to hydrogen separation membranes at high temperatures
    • R. Igi, T. Yoshioka, Y.H. Ikuhara, Y. Iwamoto and Y. Tsuru, Characterization of Co doped silica for improved hydrothermal stability and application to hydrogen separation membranes at high temperatures, Journal of the American Ceramic Society, 91(9), 2975-2981 (2008).
    • (2008) Journal of the American Ceramic Society , vol.91 , Issue.9 , pp. 2975-2981
    • Igi, R.1    Yoshioka, T.2    Ikuhara, Y.H.3    Iwamoto, Y.4    Tsuru, Y.5
  • 82
    • 67849121046 scopus 로고    scopus 로고
    • Design of silica networks for development of highly permeable hydrogen separation membranes with hydrothermal Stability
    • M. Kanezashi, K. Yada, T. Yoshioka and T. Tsuru, Design of silica networks for development of highly permeable hydrogen separation membranes with hydrothermal Stability, Journal of the American Chemical Society 131, 414-415 (2008).
    • (2008) Journal of the American Chemical Society , vol.131 , pp. 414-415
    • Kanezashi, M.1    Yada, K.2    Yoshioka, T.3    Tsuru, T.4
  • 83
    • 0037358578 scopus 로고    scopus 로고
    • Pyrolitic carbon-silica membrane: a promising membrane material for improved gas separation
    • H.B. Park and Y.M. Lee, Pyrolitic carbon-silica membrane: a promising membrane material for improved gas separation, Journal of Membrane Science, 213, 263-272 (2003).
    • (2003) Journal of Membrane Science , vol.213 , pp. 263-272
    • Park, H.B.1    Lee, Y.M.2
  • 84
    • 1842748333 scopus 로고    scopus 로고
    • Catalytic Membranes and Membrane Reactors
    • Wiley-VCH Verlag GmbH, Weinheim
    • J.G. Sanchez and T.T. Tsotsis, Catalytic Membranes and Membrane Reactors, Wiley-VCH Verlag GmbH, Weinheim (2002).
    • (2002)
    • Sanchez, J.G.1    Tsotsis, T.T.2
  • 85
  • 86
    • 0028410926 scopus 로고
    • Ethane dehydrogenation using a high-temperature catalystic membrane reactor
    • E. Gobina, and R. Hughes, Ethane dehydrogenation using a high-temperature catalystic membrane reactor, Journal of Membrane Science, 90, 11-19 (1994).
    • (1994) Journal of Membrane Science , vol.90 , pp. 11-19
    • Gobina, E.1    Hughes, R.2
  • 87
    • 17444438409 scopus 로고    scopus 로고
    • Comparison of different catalysts in the membrane-supported dehydrogenation of propane
    • R. Schafer, M. Noack, P. Keolsch, M. Steohr and J. Caro, Comparison of different catalysts in the membrane-supported dehydrogenation of propane, Catalysis Today, 82, 15-23 (2003).
    • (2003) Catalysis Today , vol.82 , pp. 15-23
    • Schafer, R.1    Noack, M.2    Keolsch, P.3    Steohr, M.4    Caro, J.5
  • 88
    • 84870293842 scopus 로고    scopus 로고
    • Catalytic dehydrogenation of ethane in hydrogen membrane reactor,
    • in Inorganic Membranes for Energy and Environmental Applications, A.C. Bose (ed.), Springer, New York
    • J. Galuszka, T. Giddings and I. Clelland, Catalytic dehydrogenation of ethane in hydrogen membrane reactor, in Inorganic Membranes for Energy and Environmental Applications, A.C. Bose (ed.), Springer, New York (2009).
    • (2009)
    • Galuszka, J.1    Giddings, T.2    Clelland, I.3
  • 89
    • 84885715596 scopus 로고    scopus 로고
    • Book of Abstracts, 9th International Conference on Catalysis in Membrane Reactors
    • Lyon
    • J. Galuszka and T. Giddings, Book of Abstracts, 9th International Conference on Catalysis in Membrane Reactors, Lyon, 47-48 (2009).
    • (2009) , pp. 47-48
    • Galuszka, J.1    Giddings, T.2
  • 91
    • 0035839710 scopus 로고    scopus 로고
    • Membrane reactors for hydrogenation and dehydrogenation processes based on supported palladium
    • R. Dittmeyer, V. Hollein and K. Daub, Membrane reactors for hydrogenation and dehydrogenation processes based on supported palladium, Journal of Molecular Catalysis A, 173, 135-184 (2001).
    • (2001) Journal of Molecular Catalysis A , vol.173 , pp. 135-184
    • Dittmeyer, R.1    Hollein, V.2    Daub, K.3
  • 94
    • 0000176718 scopus 로고    scopus 로고
    • Water gas shift membrane reactor for CO2 control in IGCC systems: techno-economic feasibility study
    • Energy Conversion and Management
    • M. Bracht, P.T. Alderliesten, R. Kloster, R. Pruschek, G. Haupt, E. Xue, J.R.H. Ross, M.K. Koukou and N. Papayannakos, Water gas shift membrane reactor for CO2 control in IGCC systems: techno-economic feasibility study, Energy Conversion and Management, 38 (Supplement I) S159-S164 (1997).
    • (1997) , vol.38 , Issue.SUPPLEMENT I
    • Bracht, M.1    Alderliesten, P.T.2    Kloster, R.3    Pruschek, R.4    Haupt, G.5    Xue, E.6    Ross, J.R.H.7    Koukou, M.K.8    Papayannakos, N.9
  • 95
    • 84885708599 scopus 로고    scopus 로고
    • Book of Abstracts, 8th International Conference on Catalysis in Membrane Reactors
    • Kolkata
    • J. Galuszka, T. Giddings, I. Clelland, D. Lu and R. Hughes, Book of Abstracts, 8th International Conference on Catalysis in Membrane Reactors, Kolkata, 47-48 (2007).
    • (2007) , pp. 47-48
    • Galuszka, J.1    Giddings, T.2    Clelland, I.3    Lu, D.4    Hughes, R.5
  • 100
    • 0032558180 scopus 로고    scopus 로고
    • Hydrogen production from hydrogen sulphide using membrane reactor integrated with porous membrane having thermal and corrosion resistance
    • H. Ohashi, H. Ohya, M. Aihara, Y. Negeshi and S.I. Semenova, Hydrogen production from hydrogen sulphide using membrane reactor integrated with porous membrane having thermal and corrosion resistance, Journal of Membrane Science, 146, 39-52 (1998).
    • (1998) Journal of Membrane Science , vol.146 , pp. 39-52
    • Ohashi, H.1    Ohya, H.2    Aihara, M.3    Negeshi, Y.4    Semenova, S.I.5
  • 101
    • 84885827473 scopus 로고    scopus 로고
    • Catalytic membrane reactor for breaking down hydrogen sulphide into hydrogen and sulfur and separating the products of this breakdown
    • US Patent Application US2004/ 0141910 A1
    • R.B. Vizoso, Catalytic membrane reactor for breaking down hydrogen sulphide into hydrogen and sulfur and separating the products of this breakdown, US Patent Application US2004/ 0141910 A1 (2004).
    • (2004)
    • Vizoso, R.B.1
  • 102
    • 0042449638 scopus 로고
    • Hydrogen-permeable composite metal membrane and uses thereof
    • US Patent 52175006
    • D.J. Edlund and D.T. Friesen, Hydrogen-permeable composite metal membrane and uses thereof, US Patent 52175006 (1993).
    • (1993)
    • Edlund, D.J.1    Friesen, D.T.2
  • 103
    • 0027908375 scopus 로고
    • Thermolysis of hydrogen sulfide in a metal-membrane reactor
    • D.J. Edlund and W.A. Pledger, Thermolysis of hydrogen sulfide in a metal-membrane reactor, Journal of Membrane Science, 77, 255-264 (1993).
    • (1993) Journal of Membrane Science , vol.77 , pp. 255-264
    • Edlund, D.J.1    Pledger, W.A.2
  • 104
    • 0028500092 scopus 로고
    • Catalytic platinum-platinum based membrane reactor for removal of H2S from natural gas stream
    • D.J. Edlund and W.A. Pledger, Catalytic platinum-platinum based membrane reactor for removal of H2S from natural gas stream, Journal of Membrane Science, 94, 111-119 (1994).
    • (1994) Journal of Membrane Science , vol.94 , pp. 111-119
    • Edlund, D.J.1    Pledger, W.A.2
  • 105
    • 53249113130 scopus 로고    scopus 로고
    • Development of a membrane reactor for decomposing hydrogen sulphide into hydrogen using a high- performance amorphous silica membrane
    • K. Akamatsu, M. Nakane, T. Sugawara, T. Hattori and S. Nakao, Development of a membrane reactor for decomposing hydrogen sulphide into hydrogen using a high- performance amorphous silica membrane, Journal of Membrane Science, 325, 16-19 (2008).
    • (2008) Journal of Membrane Science , vol.325 , pp. 16-19
    • Akamatsu, K.1    Nakane, M.2    Sugawara, T.3    Hattori, T.4    Nakao, S.5


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