Structural Changes in Sol-Gel Derived SiO2 and TiO2 Films by Exposure to Water Vapor

Journal of Sol-Gel Science and Technology

Volumn 10, Issue 1, 1997, Pages 45-54

  Imai, Hiroaki ^a   Morimoto, Hirotoki ^a   Tominaga, Atsushi ^a   Hirashima, Hiroshi ^a  

^a KEIO UNIVERSITY   (Japan)

Author keywords

Crystallization; Densification; Silica; Sol gel films; Titania; Water vapor

Indexed keywords

ABSORPTION SPECTROSCOPY; ANNEALING; CONDENSATION; CRYSTALLIZATION; DENSIFICATION; ELLIPSOMETRY; FOURIER TRANSFORM INFRARED SPECTROSCOPY; SHRINKAGE; SILICA; SOL-GELS; TITANIUM DIOXIDE; VAPORS;

WATER VAPORS;

DIELECTRIC FILMS;

EID: 0031153054     PISSN: 09280707     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1018332221696     Document Type: Article

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