Role of gas phase reactions in subatmospheric chemical-vapor deposition ozone/TEOS processes for oxide deposition

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 2, 1996, Pages 772-774

  Shareef, I A ^a   Rubloff, G W ^b   Gill, W N ^c  

^a IBM RESEARCH   (United States)

^b NORTH CAROLINA STATE UNIVERSITY   (United States)

^c RENSSELAER POLYTECHNIC INSTITUTE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0343450305     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.588713     Document Type: Article

References (5)

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4. S. Nguyen, D. Dobuzinsky, D. Harmon, R. Gleason, and S. Fridman, J. Electrochem. Soc. 137, 2209 (1990).
5. T. Kawahara, A. Yuuki, and Y. Matsui, Jpn. J. Appl. Phys. 31, 2925 (1992).