Significant densification of sol-gel derived amorphous silica films by vacuum ultraviolet irradiation

Journal of Applied Physics

Volumn 79, Issue 11, 1996, Pages 8304-8309

  Imai, Hiroaki ^a   Yasumori, Masaru ^a   Hirashima, Hiroshi ^a   Awazu, Koichi ^b   Onuki, Hideo ^b  

^a KEIO UNIVERSITY   (Japan)

^b ELECTROTECHNICAL LABORATORY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000316773     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.362541     Document Type: Review

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