Simulation of the Sputtering Process

Springer Series in Materials Science

Volumn 109, Issue , 2008, Pages 1-42

  Ono, Tadayoshi ^a   Kenmotsu, Takahiro ^b   Muramoto, Tetsuya ^a  

^a OKAYAMA UNIVERSITY OF SCIENCE   (Japan)

^b KIBI INTERNATIONAL UNIVERSITY   (Japan)

Author keywords

Angular Distribution; Auger Electron Spectroscopy; Incident Energy; Monte Carlo; Rutherford Backscattering Spectroscopy

Indexed keywords

EID: 84870238349     PISSN: 0933033X     EISSN: 21962812     Source Type: Book Series    
DOI: 10.1007/978-3-540-76664-3_1     Document Type: Chapter

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