Determination of angle resolved velocity distributions of sputtered tungsten atoms

Journal of Nuclear Materials

Volumn 266, Issue , 1999, Pages 501-506

  Goehlich, A ^a   Niemoller N ^a   Dobele H F ^a  

^a UNIVERSITY OF DUISBURG ESSEN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; EMISSION SPECTROSCOPY; FLUORESCENCE; ION BOMBARDMENT; LASER BEAM EFFECTS; SPUTTERING;

DOPPLER-SHIFTED LASER-INDUCED FLUORESCENCE (DSLF) SPECTROSCOPY; THOMPSON DISTRIBUTION;

TUNGSTEN;

EID: 0343262528     PISSN: 00223115     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-3115(98)00830-7     Document Type: Article

References (13)

1. R. Behrisch, Atom. Plasma Mat. Interact. Data Fusion 1 (1991) 7.
2. N. Noda, V. Phillips, R. Neu, J. Nucl. Mat. 227 (1997) 241-243.
3. M.W. Thompson, Phys. Rep. 69 (1981) 335.
4. P. Sigmund, Phys. Rev. 184 (1969) 383.
5. H. Bay, Nucl. Instrum. Meth. B 18 (1987) 430.
6. P. Sigmund, in: R. Behrisch (Ed.), Sputtering by Particle Bombardment, vol.1, Springer, Berlin, 1981.
7. W. Eckstein, Computer Simulation of Ion-Solid Interactions, Springer, Berlin, 1991.
8. A. Goehlich, H.F. Döbele, Nucl. Instrum. Meth. B 115 (1996) 489.
9. A. Goehlich, N. Niemöller, J. Nucl. Mater. 241-243 (1997) 1160.
10. M. Urbassek, Nucl. Instrum. Meth. B 4 (1984) 356.
11. J.P. Baxter, G.A. Schick, J. Singh et al., J. Vac. Sci. Techn. A 4 (1986) 1218.
12. B.M. Gurmin, Yu.A. Ryzhov, I.I. Shkrarban, Bull. Acad. Sci. USSR, Phys. Ser. USA 33 (1968) 752.
13. H.L. Bay, J. Bohdansky, W.O. Hofer, J. Roth, Appl. Phys. 21 (1980) 327.