Computer simulation of ion surface collisions with special emphasis to the work by Yamamura

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 232, Issue 1-4, 2005, Pages 108-116

  Eckstein, W ^a  

^a MAX PLANCK INSTITUT FÜR PLASMAPHYSIK   (Germany)

Author keywords

Backscattering; Computer simulation; Sputtering; Trajectories

Indexed keywords

APPROXIMATION THEORY; BACKSCATTERING; COMPUTER SIMULATION; ENERGY DISSIPATION; ION BOMBARDMENT; NUMERICAL METHODS; SPUTTERING; TRAJECTORIES;

CHANNELING EFFECTS; CLASSICAL DYNAMICS; COLLISIONS; ELASTIC LOSS;

SOLIDS;

EID: 19844365132     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2005.03.032     Document Type: Conference Paper

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