MD simulation of cluster ejection due to sputtering by polyatomic projectiles

Applied Surface Science

Volumn 203-204, Issue , 2003, Pages 143-147

  Muramoto, T ^a   Yamamura, Y ^a  

^a OKAYAMA UNIVERSITY OF SCIENCE   (Japan)

Author keywords

Cluster; Fragmentation; MD simulation; Sputtering

Indexed keywords

COMPUTER SIMULATION; ION BOMBARDMENT; MELTING; MONOMERS; SPUTTERING; THERMAL EFFECTS;

POLYATOMIC PROJECTILES;

COPPER;

EID: 0037438086     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(02)00718-3     Document Type: Conference Paper

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