Extended incident-angle dependence formula for physical sputtering

Journal of Nuclear Materials

Volumn 363-365, Issue 1-3, 2007, Pages 1266-1271

  Ono, T ^a   Shibata, K ^a   Kenmotsu, T ^b   Muramoto, T ^a   Li, Z ^c   Kawamura, T ^d  

^a OKAYAMA UNIVERSITY OF SCIENCE   (Japan)

^b KIBI INTERNATIONAL UNIVERSITY   (Japan)

^c INNER MONGOLIA UNIVERSITY FOR NATIONALITIES   (China)

^d CHUBU UNIVERSITY   (Japan)

Author keywords

Erosion; First wall materials; Plasma materials interaction; Sputtering

Indexed keywords

EROSION; MONTE CARLO METHODS; PARAMETER ESTIMATION; SPUTTERING;

FIRST WALL MATERIALS; INCIDENT ENERGY; PLASMA MATERIALS INTERACTION; SPUTTERING YIELD;

RADIOACTIVE MATERIALS;

EID: 34248588101     PISSN: 00223115     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jnucmat.2007.01.178     Document Type: Article

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