Oxidation resistance and hardness of TiAlSiN/CrAlYN multilayer films deposited by the arc ion plating method

Surface and Coatings Technology

Volumn 213, Issue , 2012, Pages 216-220

  Mori, T ^a   Noborisaka, M ^a   Watanabe, T ^b   Suzuki, T ^a  

^a KEIO UNIVERSITY   (Japan)

^b KANAGAWA ACADEMY OF SCIENCE AND TECHNOLOGY   (Japan)

Author keywords

Arc ion plating; Hardness; Oxidation resistance; TiAlSiN CrAlYN multilayer

Indexed keywords

ARC ION PLATING; CEMENTED CARBIDES; FILM SURFACES; GLOW DISCHARGE OPTICAL EMISSION SPECTROMETRIES; METAL OXIDES; MICRO VICKERS HARDNESS; MULTI-LAYERED; NITRIDE STRUCTURES; OXIDATION PEAK; PROFILING METHODS; ROTATION SPEED; RULE OF MIXTURE; TIALSIN;

GLOW DISCHARGES; ION IMPLANTATION; METALLIC COMPOUNDS; MONOLAYERS; MULTILAYER FILMS; MULTILAYERS; NITRIDES; OPTICAL EMISSION SPECTROSCOPY; OXIDATION RESISTANCE; X RAY DIFFRACTION;

HARDNESS;

EID: 84870182721     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2012.10.050     Document Type: Article

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