Structural, electrical, and optical properties of thermally evaporated Ge-Te, Ge-Sb-Te, and Sb-Te thin films

Physica Status Solidi (A) Applications and Materials Science

Volumn 209, Issue 10, 2012, Pages 2014-2019

  Kumar, S ^a   Singh, D ^a   Sandhu, S ^a   Thangaraj, R ^a  

^a GURU NANAK DEV UNIVERSITY   (India)

Author keywords

chalcogenides; electrical properties; microstructure; optical properties; phase transitions; phase change materials

Indexed keywords

ANNEALED FILMS; AS-DEPOSITED FILMS; CRYSTALLINE FORM; CRYSTALLIZATION TEMPERATURE; DC ELECTRICAL CONDUCTIVITY; GE-SB-TE; OPTICAL CONTRAST; OPTICAL STUDY; PHASE-TRANSITION TEMPERATURE; POLY-CRYSTALLINE BULK; PREEXPONENTIAL FACTOR; PSEUDO-BINARIES; REFLECTANCE SPECTRUM; SHEET RESISTANCE MEASUREMENTS; TEMPERATURE DEPENDENT; TEMPERATURE RANGE; UV-VIS-NIR SPECTROSCOPY; WAVELENGTH RANGES; X-RAY DIFFRACTION STUDIES; XRD;

ACTIVATION ENERGY; CHALCOGENIDES; CRYSTALLINE MATERIALS; DEPOSITS; ELECTRIC PROPERTIES; GERMANIUM; MICROSTRUCTURE; OPTICAL PROPERTIES; PHASE TRANSITIONS; REFLECTION; THERMAL EVAPORATION; THIN FILMS; X RAY DIFFRACTION;

AMORPHOUS FILMS;

EID: 84867492634     PISSN: 18626300     EISSN: 18626319     Source Type: Journal    
DOI: 10.1002/pssa.201228053     Document Type: Article

References (36)

1. A. V. Kolobov, P. Fons, A. I. Frenkel, A. L. Ankudinov, J. Tominaga, and, T. Uruga, Nature Mater. 3, 703 (2004).
2. M. Wuttig, and, N. Yamada, Nature Mater. 6, 824 (2007).
3. A. L. Lacaita, and, D. J. Wouters, Phys. Status Solidi A 205, 2281 (2008).
4. T. Gotoh, and, K. Kawarai, Phys. Status Solidi A 207, 639 (2010).
5. S. R. Ovshinsky, Phys. Rev. Lett. 21, 1450 (1968).
6. A. A. Bahgat, E. A. Mahmoud, A. S. Abd Rabo, and, I. A. Mahdy, J. Mater. Sci. 41, 3451 (2006).
7. N. Yamada, E. Ohno, K. Nishiuchi, N. Akihara, and, M. Takao, J. Appl. Phys. 69, 2849 (1991).
8. S. H. Lee, Y. Jung, H. S. Chung, A. T. Jennings, and, R. Agarwal, Physica E 40, 2474 (2008).
9. S. Loubriat, D. Muyard, F. Fillot, A. Roule, M. Veillerot, J. P. Barnes, P. Gergaud, L. Vandroux, M. Verdier, and, S. Maitrejean, Microelectron. Eng. 88, 817 (2011).
10. Y. C. Her, H. Chen, and, Y. S. Hsu, J. Appl. Phys. 93, 10097 (2003).
11. Q.-J. Wan, J. Feng, and, G. Guo, Chin. Phys. Lett. 29, 036101 (2012).
12. S. R. Ovshinsky, J. Non-Cryst. Solids 141, 200 (1992).
13. P. Nemec, J. Prikryl, V. Nazabal, and, M. Frumar, J. Appl. Phys. 109, 073520 (2011).
14. T. Matsunaga, R. Kojima, N. Yamada, K. Kifune, Y. Kubota, Y. Tabata, and, M. Takata, Inorg. Chem. 45, 2235 (2006).
15. T. Matsunaga, H. Morita, R. Kojima, N. Yamada, K. Kifune, Y. Kubota, Y. Tabata, J. J. Kim, M. Kobata, E. Ikenaga, and, K. Kobayashi, J. Appl. Phys. 103, 093511 (2008).
16. B. Roy, B. R. Charkraborty, R. Bhattacharya, and, A. K. Dutta, Solid State Commun. 25, 617 (1978).
17. C. M. Garner, L. R. Gilbert, and, C. Wood, J. Non-Cryst. Solids 15, 63 (1974).
18. M. Abkowitz, Polym. Eng. Sci. 24, 1194 (1984).
19. W. K. Njoroge, H. W. Woltgens, and, M. Wuttig, J. Vac. Sci. Technol. A 20, 230 (2002).
20. Z. S. El Mandouh, J. Mater. Sci. 30, 1273 (1995).
21. W. K. Njoroge, Phase Change Optical Recording Preparation and X-ray Characterization of GeSbTe and AgInSbTe films (PhD thesis, RWTH Aachen University, 2001).
22. I. Friedrich, V. Weidenhof, W. Njoroge, P. Franz, and, M. Wuttig, J. Appl. Phys. 87, 4130 (2000).
23. R. M. Shelby, and, S. Raoux, J. Appl. Phys. 105, 104902 (2009).
24. S. Raoux, D. Cabrera, A. Devasia, S. Kurinec, H. Y. Cheng, Y. Zhu, C. M. Breslin, and, J. J. Sweet, presented at European Phase Change and Ovonics Symposium (EPCOS 2011).
25. M. A. Majeed Khan, M. Zulfequar, and, M. Husain, J. Phys. Chem. Solids 62, 1093 (2001).
26. A. S. Soltan, A. A. Abu-Sehly, and, M. A. Abdel-Rahim, J. Phys. Chem. Solids 63, 801 (2002).
27. S. K. Bahl, and, K. L. Chopra, J. Appl. Phys. 41, 2196 (1970).
28. V. R. Katti, P. A. Govindacharyulu, and, D. N. Bose, Thin Solid Films 14, 143 (1972).
29. K. L. Chopra, S. K. Barthwal, and, D. K. Pandya, Phys. Status Solidi A 35, 761 (1976).
30. T. Kato, and, K. Tanaka, Jpn. J. Appl. Phys. 44, 7340 (2005).
31. N. F. Mott, and, E. Davis, Electronic Processes in Non-Crystalline Materials (Clarendon, Oxford, 1970).
32. J. Tauc, (ed.), Amorphous and Liquid Semiconductors (Plenum Press, New York, 1974).
33. K. Wang, C. Steimer, R. Detemple, D. Wamwangi, and, M. Wuttig, Appl. Phys. A 81, 1601 (2005).
34. W. WeÅnic, S. Botti, L. Reining, and, M. Wuttig, Phys. Rev. Lett. 98, 236403 (2007).
35. D. Lencer, M. Salinga, and, M. Wuttig, Adv. Mater. 23, 2030 (2011).
36. D. Lencer, M. Salinga, B. Grabowski, T. Hickel, J. Neugebauer, and, M. Wuttig, Nature Mater. 7, 972 (2008).