Molecular structure of a random copolymer film by plasma-enhanced CVD from a mixture of cyclohexa hydrocarbons

IEEJ Transactions on Electrical and Electronic Engineering

Volumn 7, Issue 6, 2012, Pages 546-553

  Moriki, Kazunori ^a   Yumoto, Motoshige ^a  

^a TOKYO CITY UNIVERSITY   (Japan)

Author keywords

Cyclohexa hydrocarbon; Molecular structure; PECVD; Random copolymer; Structure control

Indexed keywords

BENZENE; DANGLING BONDS; DEPOSITS; FLUORINE; FUNCTIONAL POLYMERS; HYDROGEN; MIXTURES; MOLECULAR STRUCTURE; MONOMERS; OLEFINS; ORGANIC COMPOUNDS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PLASMAS; POLYMER FILMS; POLYSTYRENES;

CYCLOHEXENES; DEPOSITED FILMS; FLUORINE RADICAL; FORMATION ENTHALPY; FUNCTIONAL SEGMENTS; HIGH-ENERGY ELECTRON; PLASMA CONDITIONS; PLASMA-ENHANCED CVD; POLYMER STRUCTURE; RADIO FREQUENCY POWER; RANDOM COPOLYMER; REACTOR WALLS; STRUCTURE CONTROL;

COPOLYMERS;

EID: 84867345195     PISSN: 19314973     EISSN: 19314981     Source Type: Journal    
DOI: 10.1002/tee.21771     Document Type: Article

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