Refractive index control of polymer film by plasma CVD for designing an optical waveguide

IEEJ Transactions on Electrical and Electronic Engineering

Volumn 5, Issue 4, 2010, Pages 416-421

  Sato, Tetsuji ^a   Moriki, Kazunori ^a   Yumoto, Motoshige ^a  

^a TOKYO CITY UNIVERSITY   (Japan)

Author keywords

Optical polymer waveguide; Plasma enhanced polymerization; Refractive index control

Indexed keywords

DANGLING BONDS; LIGHT REFRACTION; MOLECULAR STRUCTURE; MONOMERS; ORGANIC POLYMERS; PLASMA THEORY; PLASTIC FILMS; POLYMER FILMS; POLYMERS; REFRACTIVE INDEX; REFRACTOMETERS; WAVEGUIDE COMPONENTS;

CARBON AND HYDROGENS; CONVENTIONAL APPROACH; DOUBLE BONDS; OPTICAL ABSORPTION; OPTICAL POLYMER WAVEGUIDE; OPTICAL POLYMER WAVEGUIDES; PLASMA CONDITIONS; PLASMA POTENTIAL; PLASMA-CVD; REFRACTIVE INDEX CHANGES;

PLASMA POLYMERIZATION;

EID: 77954498343     PISSN: 19314973     EISSN: 19314981     Source Type: Journal    
DOI: 10.1002/tee.20554     Document Type: Article

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