SAW hydrogen gas sensor based on WO3 and Pd nanostructures

Procedia Chemistry

Volumn 1, Issue 1, 2009, Pages 200-203

  Jakubik, Wiesław ^a   Urbańczyk, Marian ^a   Maciak, Erwin ^a  

^a SILESIAN UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

hydrogen; nanostructure; palladium; SAW sensor; tungsten trioxide

Indexed keywords

ABSOLUTE RESPONSE; BI-LAYER; HYDROGEN CONCENTRATION; HYDROGEN GAS; HYDROGEN GAS CONCENTRATIONS; HYDROGEN GAS SENSORS; PD FILM; SAW SENSORS; SURFACE ACOUSTIC WAVES; THREE CHANNEL; TUNGSTEN TRIOXIDE; VERY THIN FILMS;

ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC WAVES; ACOUSTICS; NANOSTRUCTURES; PALLADIUM; SENSORS; TUNGSTEN; VACUUM DEPOSITION;

HYDROGEN;

EID: 71549173115     PISSN: 18766196     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1016/j.proche.2009.07.050     Document Type: Conference Paper

References (3)

1. D'Amico A., Palma A., and Verona E. Hydrogen sensor using a palladium coated surface acoustic wave delay-line. IEEE Ultrasonics Symp 1 (1982) 308-311
2. 3 with Pd for hydrogen detection in a surface acoustic wave sensor system. Thin Solid Films 515 23 (2007) 8345-8350
3. Wohltjen H., Barger W.R., Snow A., and Jarvis L. A vapor-Sensitive Chemiresistor Fabricated with Planar Microelectrodes and a Langmuir-Blodgett Organic Semiconductor Film. IEEE Transactions on Electron Devices ED-32 7 (1985) 1170-1174